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《Electro-Mechanical Engineering》 2011-03
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Development and Prospect of Micro-electromechanical System

CHEN Yong-hua(Nanjing Research Institute of Electronics Technology,Nanjing 210039,China)  
MEMS is a kind of miniature system,which utilizes IC manufacturing together with micro-architecture technologies to implement the integration of micro-structures,micro-sensors,micro-actuators,control/processing circuits and even interfaces,communication,power supplies etc.on one or more chip(s).It is cross-disciplinary frontier technology and has strategic significance.In this paper,the scope,classification and features of MEMS are introduced.The development history of MEMS,the development dynamics and the industrial situation of MEMS technology all over the world are summarized.On this basis,the existing main problems and key technological bottlenecks in MEMS are analyzed.The development trend and hot applications in MEMS field are discussed.Useful revelations are given for MEMS technology research.
【CateGory Index】: TP211.4
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