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《Journal of Electron Devices》 2005-01
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Development of Intelligent Measuring System for C PT Purity

TONG Qing-hua, YING Gen-yu, WANG Jian-ru (dept. of Electronics, Tsinghua University, Beijing 1000084, China)  
An intelligent measuring system for CPT parameters of electron beam is presented. It gets the image of electron beam through the CCD camera to measure the landing error , width and GR gene of the electron beam, at same time, it can also measure the GR gene and width of the graphite. As multifunctional equipment, it employs the computer as the core of controller , so it can automatically measure many parameters at same time , the efficiency enhanced greatly. Here we’ll focus on the parts of lens focus and image process, then give the measuring results.
【CateGory Index】: TN141.3
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