Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Chinese Journal of Electron Devices》 2009-02
Add to Favorite Get Latest Update

Research on Fabrication of LaB_6 Field Emitter Arrays

WANG Ben-lian,LIN Zu-lun*,WANG Xiao-ju,CAO Wei(School of Opto-Electronic Information,University of Electronic Science and Technology of China,Chengdu 610054,China)  
Field emission diode arrays on the single crystal LaB6 materials were fabricated by micromachining technologies.A series of processes of semiconductor technologies including deposition,coating,exposure,development,etching and electrochemical corrosion were introduced to fabricate field emitter arrays with good performances.The key point was the electrochemical corrosion of single crystal LaB6 materials coated with mask layers.A large number of experiments were made to find out the optimal technology parameters,including the type and deepness of electrolyte,the current of electrolyze,the time of electrolyze,etc.And then,the field emitter arrays with good surface appearance,height and roughness were obtained.
【CateGory Index】: TN305
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 9 Hits
1 YU Hai-bo,LIN Zu-lun,QI Kang-cheng (School of Optic-Electronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China);Chemical Etching Technical Research in Material of LaB_6[J];Chinese Journal of Electron Devices;2006-01
2 JI Wu-ren(Technique Reconstruct Office of BYGS,Baiyin 730900,China);Development of Research of CaB_6 Ceramic[J];Gansu Metallurgy;2009-02
3 YANG Lixia, MIN Guanghui, YU Huashun, HAN Jiande, WANG Weiti (School of Materials Science and Engineering, Shandong University, Jinan 250061, China);DEVELOPMENT OF RESEARCH OF CaB_6 CERAMIC[J];Journal of The Chinese Ceramic Society;2003-07
4 GAO Ruilan~(1), YU Huashun~(1), HAN Jiande~(1), MIN Guanghui~(1),PADERNO Y B~(2) (1. Center on New Material of School of Materials Science and Engineering, Shandong University Ji′nan 250061,China; 2. Institute of Problems for Materials,National Academy of Science of Ukraine, Kiev 03142,Ukraine);INFLUENCE OF ZrB_2 CONTENT ON PROPERTIES OF LaB_6ZrB_2 COMPOSITES[J];Journal of The Chinese Ceramic Society;2004-04
5 WANG Han-bin 1,2 , XU Zhou1, LU He-ping1, DENG Ren-pei1, YANG Xiao 2,3 , GAN Kong-yin1, JIN Xiao1, LI Ming1, LIU Xi-san1 (1. Institute of Applied Electronics, CAEP, P.O.Box 919-1014, Mianyang 621900, China; 2. Postgraduate Department of CAEP, Mianyang 621900, China; 3. Research Center of Environment Protection, CAEP, Mianyang 621900,China);DC emitting characteristics of single crystal LaB_6 thermionic cathode[J];High Power Laser & Particle Beams;2005-06
6 Han Jiande Wang Yanzhang\ Zheng Shuqi\ et al (School of Mater. Sci. and Eng., Shandong Univ., Jinan 250061);STUDY OF THE EMITTING PROPERTIES OF LaB_6 IN ELECTRON BEAM WELDER[J];Journal of Shandong University of Technology;2001-04
7 HUANG Zaisheng, LIN Zulun, CHEN Jixin (Optoeletronic Information College,University of Electronic Science and Technology ,Chengdu610054,China,Email: zaish@163.com);Research and Development of Transparent Cathode of Organic Light Emitting Diode[J];Chinese Journal of Liquid Crystals and Displays;2003-04
8 YAO Jian feng 1, CHEN Xu 1, JIANG Jian ping 1,LI Ji 2, GAO Yu juan 2, YAN Su qiu 2, CHEN Qi lue 2 (1.Dept. of Electronics Engineering, Tsinghua University, Beijing 100084,China; 2.Beijing Vacuum Electronics Research Institute, Beijing, 10001;Experimental Study on the Emission Property of the Monocrystal and Polycrystal LaB_6 Cathodes[J];Vacuum Electronics;2002-01
9 ZHU Bing-jin,CHEN Ze-xiang,ZHANG Qiang(School of Optoelectronic Information,University of Electronic Sciece and Technology of China,Chengdu 610054,China);On the preparation of LaB_6 thin films[J];Vacuum;2008-01
China Proceedings of conference Full-text Database 1 Hits
1 JIN Shuai~1 LIU Dan-min~1 ZHOU Shen-lin~1 ZHANG Jiu-xing~2 (1.Institute of Microstructure and Properties of Advanced Materials,Beijing University of Technology,Beijing 100022,China;2.College of Materials Science and Engineering,Beijing University of Technology,Beijing 100022,China);The development of LaB_6 thermionic cathode material[A];[C];2007
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved