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《Chinese Journal of Electron Devices》 2016-01
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Laser Ultrasonic Displacement Detection Technology Based on Heterodyne Interference

SI Gaolu;ZHANG Zhiwei;College of Information and Communication Engineering,North University of China;Science and Technology on Electronic Test & Measurement Laboratory,North University of China;Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education,North University of China;  
Laser ultrasonic vibration displacement is in the nanometer level. In order to detect weak signal of laserultrasonic,heterodyne interferometer system requires higher sensitivity. In order to improve the measurement preci-sion,the optical path has been improved. The double light path heterodyne interferometer enhances anti-interfer-ence capability of system,the lens are used to enhance the light gathering power of the interferometer,Increasingthe flux of interferometer,so it can improve the precision of measurement. The filter is installed in front of photoelec-tric detector,filter thestray light and improve the system signal-to-noise ratio. By high-frequency ultrasonic experi-mental verification,the displacement resolution of the system can reach 0.1 nm.
【Fund】: 山西省自然科学基金项目(2012011010-1)
【CateGory Index】: TN249
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