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《JOURNAL OF ELECTRON DEVICES》 1995-01
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Microelectrostatic drive technology of microstructure

Mao pan-song Wang Xiu Lun(Microelectronics center southeast university Nan jing 210096)  
In this paper,the principle of microstatic electric drive technology is analysed,andthe design is give with considering microstructure and material character.
【CateGory Index】: TN305.1
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【References】
Chinese Journal Full-text Database 1 Hits
1 YAO Fenglin1,2,GAO Shiqiao1 1.School of Mechanical and Electronic Engineering,Beijing Institute of Technology,Beijing 100081,China; 2.School of Mechanical and Electronic Engineering,Taiyuan University of Science and Technology,Taiyuan 030024,China;The Calculation Method of the Electrostatic Drive Force of Micro Machined Groscope Comb[J];Chinese Journal of Sensors and Actuators;2011-09
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Yao Yahong (Dept.of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084) Lu Miao,Zhao Yanjun,Cui Zhandong (Hebei Semiconductor Research Institute,Shijiazhuang 050002);Electrostatic Bonding of SiliconGlassfor Micromechanical Sensors[J];SEMICONDUCTOR TECHNOLOGY;1999-04
2 ZHAO Jian,WANG Hong-xi,JIA Jian-yuan (School of Electro-Mechanical Engineering,Xidian University,Xian 710071,China);Computation of Electrostatic Forces with Edge Effects for Micro-Structures[J];Micronanoelectronic Technology;2006-02
3 Zhan Changqing; Lo Taichin; Liu Litian and Tsien Peihsin (Institute of Microelectronics, Tsinghua University, Beijing 100084)(Hong Kong University of Sciences and Technology Microfabrication Center)Received 20 April 1996, revised manuscript received 12 N;Bimetal Membrane:An Integrated Driving Structure for Silicon Microelectromechanical Systems (MEMS) Fabrication[J];CHINESE JOURNAL OF SEMICONDUCTORS;1997-06
4 WANG Cun-chao,SU Yan,WANG Shou-rong (Dept. of Instrument Science and Engin. Southeast Univ. Nanjing 210096, China);Research on Self-Excited Driving of the Silicon Micromachined Vibratory Gyroscope Driver[J];Chinese Journal of Sensors and Actuators;2006-02
5 WANG Ling*,LIU Jun,SHI Yun-bo(National Key Lab for Electronic Measurement and Technology,North university of China,Taiyuan 030051,China);Design of Differential Capacitance Detection Circuit[J];Chinese Journal of Sensors and Actuators;2006-06
6 JIANG Qing-hua,YUAN Wei-zheng,CHANG Hong-long,CUI Jin-qiang(Micro&Nano System Laboratory,Northwestern Polytechnical University,Xi'an 710072,China);An Improved Drive Circuit for Vibratory Microgyroscopes[J];Chinese Journal of Sensors and Actuators;2008-03
7 DONG Xin, WU Jun-miao, ZOU De-shu, SHI Yan-li, DENG Jun,DU Jin-yu, GAO Guo, SHEN Guang-di (Beijing Optoelectronic Techn. Lab.,Beijing Polytechnic University,Beijing 100022,China);Analysis of current-time characteristic in silicon-glass anodic bonding[J];Journal of Transducer Technology;2001-03
8 BAO Fang, LI Ji rong, WANG Chun ru (Coll. of Automation,Guangdong University of Technology,Guangzhou 510090,China);Research on magnetostrictive devices and its applications[J];Journal of Transducer Technology;2001-08
9 CHEN Guang wen, XU Gao pan, HU Guo qing (Dept. of Mech. and Elec. Engin.,Xiamen University,Xiamen 361005,China);Deformation analysis of silicon cantilever for electrostatic microswitch[J];Journal of Transducer Technology;2001-12
10 Hu Mingzhe, Li Qiang, Li Yinxiang, Zhang Yiling (Wuhan University of Technology, Wuhan 430070);Research on Characteristics and Applications of Magnetostrictive Materials[J];Rare Metal Materials and Engineering;2000-06
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 LI Yu-peng 1,SUN Hong-sheng 2,YIN Xue-pu 1 (1.School of Mechanical Engineering,Yanshan University,Qinhuangdao 066004,China;2.School of Continuation Education,Yanshan University,Qinhuangdao 066004,China);Structural design and numerical simulation analysis of electrothermal clamp holder[J];Journal of Machine Design;2008-11
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