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Microelectrostatic drive technology of microstructure

Mao pan-song Wang Xiu Lun(Microelectronics center southeast university Nan jing 210096)  
In this paper,the principle of microstatic electric drive technology is analysed,andthe design is give with considering microstructure and material character.
【CateGory Index】: TN305.1
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1 YAO Fenglin1,2,GAO Shiqiao1 1.School of Mechanical and Electronic Engineering,Beijing Institute of Technology,Beijing 100081,China; 2.School of Mechanical and Electronic Engineering,Taiyuan University of Science and Technology,Taiyuan 030024,China;The Calculation Method of the Electrostatic Drive Force of Micro Machined Groscope Comb[J];Chinese Journal of Sensors and Actuators;2011-09
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【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 LI Yu-peng 1,SUN Hong-sheng 2,YIN Xue-pu 1 (1.School of Mechanical Engineering,Yanshan University,Qinhuangdao 066004,China;2.School of Continuation Education,Yanshan University,Qinhuangdao 066004,China);Structural design and numerical simulation analysis of electrothermal clamp holder[J];Journal of Machine Design;2008-11
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