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《ACTA ELECTRONICA SINICA》 1995-06
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Application of Microwave Resonator Probe to Measurement Plasma Density

Cao Jinxiang; Xu Hongliang; Yu Changxuan; Zeng Lei; Zhao Hongbo, ,Ding Weixing; Xu Bing; Shen Haigen; Jin Kai(Department of Modern Physics, University of Science and Technology of China,Hefei 230026)  
A microwave resonator probe method for diagnosing local plasma electron density is described,and the measurement principle,design method and experiment results are included. The experimental results show that the microwave resonator probe is much more reliable than Langmuir probe in the measurement of plasma density due to its completeness. The spatial resolution depends upon the size of microwave resonator probe.
【Fund】: 国家自然科学基金
【CateGory Index】: TH834
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Chinese Journal Full-text Database 5 Hits
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【Co-citations】
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【Co-references】
Chinese Journal Full-text Database 8 Hits
1 Yuan Qiang-Hua Xin Yu Huang Xiao-Jiang Sun Kai Ning Zhao-Yuan(Provincial Key Laboratory of Thin Films,School of Physical Science and Technology,Suzhou University,Suzhou 215006,China);Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasma[J];物理学报;2008-11
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8 Cao Jinxiang; Xu Hongliang; Yu Changxuan; Zeng Lei; Zhao Hongbo, ,Ding Weixing; Xu Bing; Shen Haigen; Jin Kai(Department of Modern Physics, University of Science and Technology of China,Hefei 230026);Application of Microwave Resonator Probe to Measurement Plasma Density[J];电子学报;1995-06
【Secondary References】
Chinese Journal Full-text Database 8 Hits
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