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《Journal of Fudan University》 1988-03
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SEM ANALYSIS OF CROSS SECTIONS FOR SEMICONDUCTOR CHIP

Zhou Wenying;Xu Yuanhua, (Department of Electronic Engineering)  
The IC chip cross sectional SEM analysis technique is described. It containscross-sectional method of IC chip, delineation and SEM observation technique. Someimportant processes in IC manufacturing are analysed, and very important processdata of device are obtained through this analysis method.
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