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《Chinese Journal of Luminescence》 2013-03
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Fabrication of The Long-wave Infrared Germanium Carbide Antireflection Coatings by End-Hall Ion Source

WANG Tong-tong*(Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)  
The antireflective and protective coatings were deposited on the germanium substrates to improve the transmittance and the environmental adaptability.The germanium carbide(Ge1-xCx) coatings were successfully fabricated.The pure germanium was evaporated by the e-gun,and the methane was directly ionized by End-Hall ion source.The different optical constants of the germanium carbide coatings were obtained by controlling the deposition rate and fixing End-Hall ion source parameters.The germanium carbide coatings with different deposition rates were all amorphous tested by X-ray diffraction.The optical constants were calculated by the envelope method from the transmittance data measured by Fourier transform infrared(FTIR) spectrometer.After double-side depositing the germanium carbide coatings on the germanium substrate,an average transmittance Tave85% was achieved in the long-wave infrared region of 7.5-11.5 μm.After the environment tests,the germanium carbide coating was fine,this indicates the germanium carbide coating has great environmental adaptability.
【Fund】: 国家自然科学基金(60478035)资助项目
【CateGory Index】: O484
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