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《Chinese Journal of Luminescence》 2013-03
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Fabrication of The Long-wave Infrared Germanium Carbide Antireflection Coatings by End-Hall Ion Source

WANG Tong-tong*(Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)  
The antireflective and protective coatings were deposited on the germanium substrates to improve the transmittance and the environmental adaptability.The germanium carbide(Ge1-xCx) coatings were successfully fabricated.The pure germanium was evaporated by the e-gun,and the methane was directly ionized by End-Hall ion source.The different optical constants of the germanium carbide coatings were obtained by controlling the deposition rate and fixing End-Hall ion source parameters.The germanium carbide coatings with different deposition rates were all amorphous tested by X-ray diffraction.The optical constants were calculated by the envelope method from the transmittance data measured by Fourier transform infrared(FTIR) spectrometer.After double-side depositing the germanium carbide coatings on the germanium substrate,an average transmittance Tave85% was achieved in the long-wave infrared region of 7.5-11.5 μm.After the environment tests,the germanium carbide coating was fine,this indicates the germanium carbide coating has great environmental adaptability.
【Fund】: 国家自然科学基金(60478035)资助项目
【CateGory Index】: O484
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【References】
Chinese Journal Full-text Database 1 Hits
1 QU Feng1,ZHU Hua-xin 2,LIU Gui-lin 2,LI Shuai 2,SUN Qiang1(1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2 School of Science,Jiangnan University,Wuxi 214122,China);Wideband and high performance anti-reflection coatings in visible light spectrum based on ZF6 substrate[J];Chinese Optics;2013-04
【Co-references】
Chinese Journal Full-text Database 7 Hits
1 FANG Shufen1,FU Xinhua2,ZHOU Binbin2(1.Tieling Teachers College,Tieling 112001;2.Changchun University of Science and Technology,Changchun 130022);Research on Technique and Design of Ar-coating on Crystal Surface[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2007-04
2 YE Long-Qiang,ZHANG Xin-Xiang,XIAO Bo,YE Hai-Ping,JIANG Bo (Key Laboratory of Green Chemistry & Technology,Ministry of Education,College of Chemistry, Sichuan University,Chengdu 610064,China);Design and Preparation of SiO_2/SiO_2-TiO_2 Antireflective Coating with Excellent Environmental Resistance[J];Chemical Journal of Chinese Universities;2012-05
3 Yu Tianyan Zhu Furong Liu Dingquan Zhang Fengshan (Shanghai Institute of Technology and Physics, The Chinese Academy of Science, Shanghai 200083);Design and Deposition of Broadband IR Antireflection Coatings on ZnS Lenses[J];Acta Optica Sinica;2005-02
4 ZHANG Li-chao1,GAO Jin-song2(1.State Key Laboratory of Applied Optics,Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China; 2.Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics and Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China);Developments of DUV coating technologies in CIOMP[J];Optics and Precision Engineering;2012-11
5 WEI Zi-xun,FU Xiu-hua,SHI Peng,MEI Yu-shan (School of Opto-electronic Engneering,Changchun University of Science and Technology,Changchun 130012,China);Fabrication of broadband AR coating for three-dimensional laparoscopic facet[J];Chinese Journal of Optics;2011-02
6 YANG Dao-qi,FU Xiu-hua*,GENG Si-yu,YANG Yong-liang,PAN Yong-gang (School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China);Design and fabrication of 0.6-1.55 μm visible/near infrared ultra-broad band antireflection coatings[J];Chinese Optics;2012-03
7 Sun Jing-Hua~(1)2)3)) Xu Yao~(1)) Yan Liang-Hong~(2)) LüHai-Bing~(2)) Yuan Xiao-Dong~(2)) 1)(Key Laboratory of Carbon Materials,Institute of Coal Chemistry,Chinese Academy of Sciences,Taiyuan 030001,China) 2)(Laser Fusion Research Centre,Chinese Academy of Engineering Physics,Mianyang 621900,China) 3)(Graduate University of the Chinese Academy of Sciences,Beijing 100049,China);Ordered mesoporous antireflective films for 1053 nm high power pulse laser[J];Acta Physica Sinica;2012-20
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