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《Journal of Huaibei Coal Industry Teachers College(Natural Science Edition)》 2006-01
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Effect of Magnetron Sputtering Growth Parameters on Electrical Properties of ZnO:Al

YIN Sheng-dong,MA Yong,JI Yong-liang(School of Physics &Information Technology,Chongqing Normal University,400047,Chongqing,China)  
Transparent conductive ZnO:Al(ZAO) thin films are semi-conductor oxides with both high carrier concentration and large optical band gap.ZAO films have outstooding electrical and optical properties,and are emerging as a most potential alternative candidate for transparent conducting material.The applications and the proposal for the future research of ZAO are described.The effect of growth parameters on the properties are mostly analysed.
【Fund】: 重庆市教委科研基金资助项目(040810)
【CateGory Index】: O472.4
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