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Characteristics and development of conventional scanning electron microscope

Gan Shuyi (Eepartment of Precision In- struments, Hefei University of Technology, Hefei, 230009)  
The performance and applications of conventional scanning electron microscope (SEM) are limited due to its working principle and construction, To overcome its shortcomings, two sigruficant meas were taken in the processof the development of SEM.First, the sample chamber was separated for electron column and the vacuum of the chamber was decreased, thus the sample chamber can sustain pressures as high as 10~3 Pa .Second, the environmental secondary detector (ESD ) was invented. The ESD is insensitive to light and heat, and can climinate automatically the charge accumulation on sample surface. These measures lead to the advent of environmental scanning microscope (ESEM) which is greatly improved in performance and there isnearly no limitations to its field of applications
【CateGory Index】: TH74
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