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《Journal of Engineering Design》 2004-03
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Robust design for MEMS devices

YANG Tao, HE Ye, WEI Dong-mei, LI Lei-min(College of Information and Control Engineering, Southwest University ofScience and Technology, Mianyang 621002, China)  
Microelectromechanical Systems (MEMS) offer an emerging and multidisciplinary research area. Cost and reliability are essential to the commercialization of MEMS. As compared with mechanical machining and IC fabrication, micromachining has the disadvantage of large and intractable dimensional uncertainty, which should be accommodated during design process. Robust design improves the robustness of designs in the presence of uncertainty without having to increase manufacturing cost. Robust optimization design approaches can be classified into two major categories, namely Taguchi method and tolerance-based method. The latter is better suit for constrained optimization. Case studies of a micro-accelerometer and a micro-valve are introduced to illustrate the validation of robust optimization design for MEMS devices, where signal-noise ratios are improved significantly.
【Fund】: 国家"863"计划资助项目(2003AA404160);; 国防基础研究计划资助项目(K1303060115);; 西南科技大学引进人才科研启动基金资助项目(2K043100).
【CateGory Index】: TN402
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