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《OPTO-ELECTRONIC ENGINEERING》 1998-S1
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Research on Quality Evaluation Method for Diffractive Microlens Array

Deng Qiling,Du Chunlei,Yang Zeping (State Key L aboratory of Optical Technologies for Microfabrication,Institute of Optics and Electronics, Chinese Academy of Sciences,Chengdu,6 1 0 2 0 9)  
The evaluation method for the diffractive efficiency of the binary diffractive microlens array used in Shack- Hartmann wavefront sensor is studied according the project requirements.An expression between the manufacturing error and diffractive efficiency is set up and the method for evaluating diffractive efficiency from the manufacturing error is investigated.A measuring system is constructed.
【CateGory Index】: TH74
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【References】
Chinese Journal Full-text Database 1 Hits
1 Deng Qiling, Du Chunlei,Wang Changtao State Key Laboratory of Optical Technologies for Micro fabrication,Institute of Optics and Electronics, Chinese Academyof Science, Chengdu 610209;Measurement of the Continuous Surface Microlens Array[J];光子学报;2004-11
【Co-references】
Chinese Journal Full-text Database 5 Hits
1 Liu Desen,Hu Jianming,Liu Xiaodong,Liu Feng Dept of Physics,South-West China Normal University,Chongqing 400715,China;Studies on the Optical Proporties of Microlens Array for Planar Intersect Glasses Waveguide[J];光子学报;2003-07
2 Cao Zhaoliang 1,Lu Guang 2, Wang Jizeng 3, Yang Bai 2, Lu Zhenwu 1, Li Fengyou 1, Ren Zhibin 1,Liu Yuling 1 1 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022 2 Key Lab of Supramolecular Structure and Materials of Educational Ministry, College of Chemistry, Jilin University, Changchun 130023 3 Baicheng Normal College, Baicheng 137000;Fabrication of Submicron Elements by Ion Beam Etching[J];光子学报;2003-06
3 Deng Qiling,Du Chunlei State Key Lab of Optical Technologies for Microfabrication ,Institute of Optics and Electronics, Chinese Academy of Sciences,Chengdu 610209;THE RESEARCH ON REPLICATION OF MICRO-OPTICAL ELEMENTS[J];光子学报;2002-01
4 TIAN Weijian SUI Chenghua LI Qiaowen (Institute of Technical Physics, Zhejiang University of Technology, Hangzhou 310014) CHEN Bo (Information Optics Research Center, Sichuan University, Chendu 610064);Measurements for the Focal Length of Refractive Microlens Arrays[J];光学仪器;1999-02
5 Deng Qiling,Du Chunlei,Yang Zeping (State Key L aboratory of Optical Technologies for Microfabrication,Institute of Optics and Electronics, Chinese Academy of Sciences,Chengdu,6 1 0 2 0 9);Research on Quality Evaluation Method for Diffractive Microlens Array[J];光电工程;1998-S1
【Secondary References】
Chinese Journal Full-text Database 2 Hits
1 WAN Li-li,XU Ping,CHEN Xiang-xian,HUANG Jie-feng ,WANG Kai,LIU Jia-yong,HUANG Hai-xuan (College of Electronic Science and Technology,Shenzhen University,Shenzhen,Guangdong 518060,China);Research on Union of Micro Optical Array and Light Guide Plate in Cell Phone[J];光子学报;2008-12
2 Luo Ningning,Gao Yiqing,Shen Tingzheng,Qi Xinmin,Zhu Xiaojin,Chen Jinsong Department of Measurement and Control,Nanchang Institute of Aeronautical Technology,Nanchang,Jiangxi 330034;Research of the Fabrication Method for Color-equivalent-gray Masks[J];光子学报;2005-12
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