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Formation Method of Gray-Scale Mask Patterns Used for Producing Micro Optical Elements

ZHOU Li shu,LI Xue min,DU Chun lei HUO Yong feng,ZHANG Yi min (State Key Laboratory of Optical Technology for Microfabrication,Institute of Optics and Electronics, Chinese Academy of Sciences,Chengdu 610209,China)  
In view of the manufacturing method of continuous micro optical elements with gray scale mask,the critical steps such as converting from element structure to gray scale patterms,correction of gray scale patterns,digitalization of gray scale patterns and patterns coding are presented.Some practical examples for producing mask patterns of micro lens array are given in the end.
【Fund】: 中国科学院光电技术研究所所长基金资助!( JK980 5 )
【CateGory Index】: TN405
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