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《Opto-electronic Engineering》 2000-06
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A New Method for Fabrication of Continuous Micro Lens Array with Wet Etching

LUO Hong xin, ZHOU Li shu, DU Chun lei (State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China)  
The main problems in making continuous micro lens array are to control the depth of relief and relief surface shape.The existing methods cannot solve these problems.A new method for making continuous relief micro lens on the wafer by the combination of dry and wet etching is proposed in the paper.Micro cylindrical surfaces with a depth of 40μm and rotary parabolic surface micro lens array are obtained.
【CateGory Index】: TN256
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