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《Opto-electronic Engineering》 2000-06
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A Method for Eliminating the Delay of Acousto Optic Modulator in Laser Direct Writing System

WU Jian,LIU Yu ling,SHEN Yi bing,LI Pei yong (State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027,China)  
Laser direct writing is a suitable method for processing diffractive optical elements and mask.Controlling exposure power by means of acousto optic modulator is critical for the performances of the fabricated devices.The delay of acousto optic modulator and its harmful effect on patterns of mask surface are first described.Based on the above analysis,we propose a method to overcome the problems brought by delay of acousto optic modulator.The design principle and implementation of this technology are described in brief.The fabricated mask sample patterns in practice show the effectiveness of the described method.
【Fund】: 国家自然科学基金资助项目!(6 978980 3)
【CateGory Index】: TN24
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【References】
Chinese Journal Full-text Database 1 Hits
1 LIANG Yi-yong (State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027, China);An all-digital rotating platform system for laser direct writer[J];Opto-electronic Engineering;2004-05
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Shen Yibing ;Zhou Guangya ;Liu Yuling(State Key Laboratory of Modern Optical Instrument, Zhejiang University, Hangzhou, 310027);Control of Stabilizing the Laser Power in Laser Direct Writting System[J];CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT;1999-02
【Co-citations】
Chinese Journal Full-text Database 5 Hits
1 Liu Qingke (Mechanical Engineering college, Liaoning Technical University);THE HOMOLOGY EQUATION OF SPACE FIELD AND ITS APPLICATION[J];JOURNAL OF ENGINEERING GRAPHICS;2000-01
2 LIANG Yi-yong (State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027, China);An all-digital rotating platform system for laser direct writer[J];Opto-electronic Engineering;2004-05
3 XU Bing, WEI Guo-jun, CHEN Lin-sen(Institute of Information Optical Engineering, Soochow University, Suzhou 215006, China);Research Advances in Technology of Laser Direct Writing[J];Optoelectronic Technology & Information;2004-06
4 CHEN Linsen,XIE Jianfeng,SHEN Yan,WANG Zhenhua,LU Zhiwei (Institute of Information Optical Engineering,Suzhou University,Suzhou 215006,China);Fabrication of 3D Image Laser Printing System with SLM[J];Laser & Infrared;2003-05
5 Chen Linsen, Xie Jianfeng, Shen, Yan, Wang Zhenhua, Lu Zhiwei(Institute of Information Optical Engineering, Soochow University, Suzhou 215006, China);A Novel Laser Printing System for Digital Three-dimensional Diffraction Images[J];Chinese Journal of Scientific Instrument;2005-04
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Song Dengyuan (Department of Electronics and Informational Engineering,Hebei University,Baoding 071002) Wang Xiaoping (Zhangjiakou Vocational University,Zhangjiakou 075000);Laser Holographic Lithography and Applications[J];SEMICONDUCTOR TECHNOLOGY;2000-02
2 FENG Bo-ru 1 ,ZHANG Jin 1,2 ,ZONG De-rong 1 ,JIANG Shi-lei 1 ,SU Ping 1,2 ,CHEN Bao-qin 3 ,CHEN Fen 4(1.State Key Lab of Optical Technologies for Microfabrication,Institute of Optics&Electronics,Chinese Academy of S;Study of interferometric lithography without masks[J];Semiconductor Information;2002-03
3 DU Jing-lei 1 ,SHI Rui-ying 2 ,CUI Zheng 3 ,GUO Yong-kang 1(1.Physics Department ,Sichuan University,Chengdu610064,China;2.Microelectronics R&D Center,The Chinese Academy of Scienes,Beijing100029,China;3.Rutherford Appleton Laboratory,Chilton,Didcot,Oxon OX110QX,UK);Proximity effects during mask fabrication[J];Semiconductor Information;2002-11
4 Li Xuemin ;Lu Guowei (Institute of Applied Physics, UEST of China Chengdu 610054)Zhou Lishu (Institute of Optics Electronics, Chinese Academy of Science Chengdu 610041 );A Novel Method for Refractive Microlens Array Fabrication[J];JOURNAL OF UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA;2000-03
5 XIONG Mu-di, ZHANG Hui-min, XIAO Wen-li, XING Zhong-bao (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China);A New Method for Adjusting Spindle Velocity of Binary Optical Element Laser Direct-Writing Device[J];Opto-electronic Engineering;2001-02
6 ZHANG Jin1,2, FENG Bo-ru2, GUO Yong-kang1, JIANG Shi-lei2, ZONG De-rong2, DU Jing-lei1, ZENG Yang-su1, GAO Fu-hua1 (1. Department of Physics, Sichuan University, Chengdu 610064, China; 2. State Key Laboratory of Optical Technologies for Microfabrication,;Laser Interference Photolithography for Fabricating Periodic Patterns in Large Area[J];Opto-electronic Engineering;2001-06
7 LIU Yu-ling (Department of Instrument Science and Engineering, Zhejiang University, Hangzhou 310027, China);Identification of Acousto-Optic Modulator Model and Design of Control System for Light Power[J];Opto-electronic Engineering;2002-05
8 LIANG Yi-yong ( State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027, China );Control techniques based on referenced defocus amount[J];Opto-electronic Engineering;2004-01
9 LIU Juan, FENG Bo-ru, ZHANG Jin ( 1. State Key Laboratory of Optical Technologies for Microfabrication, The Institute of Optics and Electronics, The Chinese Academy of Sciences, Chengdu 610209, China ; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China );Imaging interferometric lithography and its spatial frequency analysis[J];Opto-electronic Engineering;2004-10
10 Hou Desheng, Du Chunlei Qiu Chuankai, Bai Linbo (State Key Laboratory of Optical Technology for Microfabrication,Institute of Optics & electronics, Chinese Academy of Sciences,Chengdu,610209);Model ISI 2802 Laser Direct Write System and Its Applications[J];OPTO-ELECTRONIC ENGINEERING;1997-S1
【Secondary Citations】
Chinese Journal Full-text Database 1 Hits
1 Zhou,Guang-ya; Hou,Xi-yun; Xu,Qiao; Ye,Jun(High Technology Optical Center Zhejiang University);Investigation of Polar Coodinate Laser Direct Writer[J];CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT;1996-S1
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