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《Opto-electronic Engineering》 2001-05
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Production of Optical Coatings with Ion Beam Sputter Deposition Technique

ZHANG Yun-dong, LIU Hong-xiang (Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China)  
Ion beam sputtering deposition technique is an important method for preparation of high-quality optical coatings developed in recent years. It has some incomparable advantages than that of the other coating deposition techniques. But the research, introduction and reports for this technique are very few. The development, principle, characteristics and application prospect of this technique are emphatically introduced in the paper.
【CateGory Index】: TN304.055
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