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《Opto-electronic Engineering》 2002-05
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Identification of Acousto-Optic Modulator Model and Design of Control System for Light Power

LIU Yu-ling (Department of Instrument Science and Engineering, Zhejiang University, Hangzhou 310027, China)  
Stability and continuous adjustment of exposure light source power in laser direct writing system have important significance in manufacturing of binary devices. Transfer function of an acousto-optic modulator is obtained through Identification of the mathematical model of acousto-optic modulator by using MABLAB tool. By means of SIMULINK tool box for MABLAB, the simulation model for the control system is designed and a practical control system is obtained. The experimental results show that AR model reflects the properties of the acousto-optic modulator in a well mode. The designed control system has the advantages of fast response speed and high control accuracy.
【Fund】: 国家自然科学基金资助项目(59472020);; 浙江省自然科学基金资助项目(596048)
【CateGory Index】: TN248
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