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《Opto-electronic Engineering》 2004-11
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The influence of stress on transmission property of narrow-band filter with multilayer thin film

WANG Cheng,ZHANG Gui-yan,MA Ying,XIAO Meng-chao,QIAN Long-sheng(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130022,China)  
The relation between multilayer thin film strain and film thickness variations is analyzed on the base of thin film stress formula and micro-bending principle of elasticity. Theoretic model for the relation between variations of substrate curvature and film thickness is established and the expression for the thickness non-uniformity variation of thin film-layer is obtained. If the variation of optical path length is identical, it will lead center wavelength shift only, but the variation of optical path length is non-identical and it will lead to not only center wavelength shift but also degradation of transmission curve. For a 100GHz filter, simulated result was that center wavelength and bandwidth decreased by 0.977nm and 0.19nm,respectively when the thickness of substrate is reduced from 10mm to 1.0mm. Then, random errors of thin film thickness are introduced to simulate spectrum. The results are that center wavelength, ripple and peak insertion loss increased by 1.066nm, 0.36dB, 0.32dB,respectively. The transmission curve is further degraded. The results show that the irregularity of thin film thickness variation caused by substrate curvature changes is one of the main reasons of spectrum degradation of the narrow band filter.
【Fund】: 国家863高技术项目资助;; 中国科学院光电科技集团项目(KGCX2-405) 
【CateGory Index】: O484
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