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《Opto-Electronic Engineering》 2007-04
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Real-time control method for laser direct writing mesh on the concave spherical substrate

LIANG Feng-chao1, 2,HU Jun1,XU Zhi-jun1 ( 1. Changchun Institute of Optics, Fine Mechanics and Physics, the Chinese Academy of Sciences, Changchun 130033, China; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China )  
Real-time control method for laser direct writing mesh on the concave spherical substrate was brought forward in this paper. The method was based on Dual-Ported RAM (DPRAM) and was accomplished by adopting the control method of dual CPUs’ (computer and PMAC) parallel running, bi-direction communication, exchanging data or commands immediately, and also by developing the relevant nesting programs. Consequently, the control parameters and the state information between the computer and PMAC could be dealt with, exchanged and displayed real-timely. So, the real-time control method for laser direct writing mesh on the concave spherical substrate was realized. After coating uniform thickness film of photoresist on the concave spherical substrate made of glass with Φ200 and a radius equal to 150 mm, mesh with 100 μm periods were fabricated on the substrate by applying the real-time control method to the laser direct writing system. After development and fixation, the error of gridding periods measured by micron level reading measure microscope are within ±3%, which satisfies the design requirement.
【Fund】: 国防科技预研基金项目
【CateGory Index】: TN249
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