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《High Technology Letters》 2002-09
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A Novel Silicon Micromachined Gyroscope

Xiong Bin, Wang Yuelin, Huang Xiaozhen, Wang Weiyuan (State Key Laboratory of Transducer Technology, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050)  
A novel gyroscope with the same Q factor of detected mode and driven mode was designed. The device structure which we called "fence gyro" consists of a proof mass with bars linked up to substrate by suspend springs. The calculated result shows that the device has its Q factor of detected mode and driven mode in almost same order of 140 at atmospheric pressure. Also it shows that the larger bandwidth with flat band can be obtained. The devices are fabricated by silicon glass bonding wafers and deep reactive ion etching technology.
【Fund】: 973规划 (G19990 3 3 10 1)
【CateGory Index】: TH703
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