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《Photographic Science and Photochemistry》 2007-02
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Studies on the Acid-Generation Properties of a New Phthalocyanine Derivative as Photoetching Recording Materials

HUANG Lei,BIN Yue-jing,HUANG Xin,ZHANG Fu-shi(Key Lab of Organic Optoelectronics and Molecular Engineering of Ministry of Education,Department of Chemistry,Tsinghua University,Beijing 100084,P.R.China)  
A New Phthalocyanine derivative,the p-toluenesulfonylphthalocyanine was synthesized from metal-free phthalocyanine.The photolysis properties of the compound exposed with UV light was investigated.It was found that the p-toluenesulfonylphthalocyanine can generate acid after exposure.With good photocatalysis property,this photoacid-generator is applicable to chemically amplified photoresist.
【Fund】: 国家自然科学基金(20333080 20572059 20502013);; 国家基础研究项目(2007CB808000)
【CateGory Index】: TQ571
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【Citations】
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