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《Journal of Functional Materials and Devices》 2010-02
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Preparation and characterization of fluorine-doped tin oxide conductive glass deposited by spray pyrolysis

ZHANG Zhi-hai1,SHI Cheng-wu1,2,SUN Song-quan2,3,WU Yu-cheng1(1. School of Materials Science and Engineering,Hefei University of Technology,Hefei 230009,China;2. Postdoctoral Research Workstation,Bengbu Construction Investment Co.Ltd,Bengbu 233000,China;3. Polar Photovoltaics Co.Ltd,Bengbu 233030,China)  
Transparent conducting thin films of F:SnO2 have been deposited onto preheated microscopic glass slides by intermittent spray pyrolysis deposition using pentahydrate stannic chloride (SnCl4·5H2O) and ammonium fluoride (NH4F) as precursors. A perfume atomizer for cosmetics use has been used for deposition. As-deposited films were characterized by XRD,SEM,UV-VIS spectrophotometer and four-point-probe setup. The influence of spray times,substrate temperature,precursor concentration,doping concentration and ethanol to water ratio on the optical and electrical properties of films above mentioned were discussed. The results show that the sheet resistance of the thin films is 13 Ω/□ and the average transmittance is 79%,when the concentration of SnCl4·5H2O is 0.81 mol/L,the concentration of NH4F is 0.1 mol/L,the ethanol to water ratio is 8:2,being sprayed 100 times at 500 ℃.
【Fund】: 安徽省人才开发专项资金
【CateGory Index】: O484.1
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