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《JOURNAL OF FUNCTIONAL MATERIALS AND DEVICES》 1996-03
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NONLINEARITY OF PZT AND ITS LINEARIZED CONTROL THEORY

Yihui WU;Yiming YANG;Liding WANG(Changchun Institute of Optics Fine Mechanics,Chinese Academy of Sciences,Changchun 130022)(Guangdong University of Technology,Guangdong 510090)  
Baisic reason that causing hysteresis of PZT was analyzed,the theory of charge control was expounded the special characteristics of piezo-positioning system was revealed and the way to obtain good linearity and dynamic characteristics was pointed out in this paper.
【CateGory Index】: TN384
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