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《Research & Progress of SSE》 2010-04
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Design of ROIC in Uncooled Infrared Detector Based on MEMS

ZHANG Qiang WU Xiaobo YANG Yang SUN Liang(Institute of VLSI Design,Zhejiang University,Hangzhou,310027,CHN)  
An uncooled infrared detector based on MEMS is widely used in military and civil field.Therefore,the critical technology of core component of the detector,i.e.ROIC(read out integrated circuit) of the focal plane array(FPA),is of most importance.This work designed a ROIC of a 240×320 FPA.The circuit could suppress fluctuations of MEMS process as well as the environmental temperature of the detector.The design was fabricated in HHNEC 0.5 μm process.The test result is consistent with the expectations well.The output voltage of the chip is 1.5~3.5 V.And the image output time is 16.32 ms/frame,i.e.,the output speed of 61 frame/s is achieved.
【Fund】: 国家自然科学基金资助项目(60906012)
【CateGory Index】: TN215
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