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《Optics & Optoelectronic Technology》 2005-01
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Research on Stimulated Annealing Algorithm of Film Optical Constant

LI Jian-chao SU Jun-hong ( Shaanxi Province Thin Film Technology and Optical Test key Lab, Xi’an Institute of Technology, Xi’an 710032, China )  
The initial value given by the operator is very important for the measurement results of spectroscopic ellipsometry (SE) in the fitting of film optical constant, and the model requires the initial value with high standard. In the paper, the simulated annealing algorithm which is a new optimization method is widely used to determine the film optical constant in order to reduce the requirement of the initial value and make the operator obtain the accurate optical constant easily. Through the analysis of the stimulated annealing algorithm and very fast Stimulated Annealing (VFSA) method, it makes an improvement in the model disturbance and annealing scheme and also enhances the steadiness of VFSA algorithm. It proves the availability of the improved stimulated annealing method by using a large amount of fitting practice.
【CateGory Index】: O484.4
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