Focused spot shaping in laser writing system
LI Feng-you,LI Hong-jun, LU Zhen-wu, LIAO Jiang-hong (State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China)
The diffractive optical elements (DOE) with shaping the focused spot for laser writing system are designed , while discussing their performances for shaping laser writing spot. An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented. The simulating results indicate that the spot-shaped sizes is only more twice than the diffraction limited spot sizes under this system, its diffraction efficiency is about 71.38% and the edges of the uniform area become dramatically sharper than the result without DOE.