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《Optics and Precision Engineering》 2003-01
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MEMS measurement technologies and methods

LI Zhi, WANG Xiang-jun (National Laboratory of Precision Measurement Technology and Instruments,College of Precision Instrument and Opto-electronic Engineering, Tianjin University, Tianjin 300072, China)  
The rapid development of microelectromechanical systems (MEMS) makes i t necessary to have precise measurement during the design , simulation, fabrication, and evaluation of MEMS. The MEMS measu r ement technologies and methods are reviewed from the viewpoints of mechanical pa ramet ers,geometric dimensions and material properties on a micro-scale. The micro-vi si on metrology technology, the interferometer and some optoelectronic detection me thods used for measurement are discussed in detail.
【CateGory Index】: TH703
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