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《Optics and Precision Engineering》 2006-04
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Research on precise traveling positioning stage driven by piezoelectric bimorph

HUA Shun-ming,ZHANG Hong-zhuang,CHENG Guang-ming,FAN Zun-qiang,LIU Jian-fang(College of Mechanical Science and Engineering,Jilin University, Changchun 130025,China)  
Driven by piezoelectric bimorph actuator,a new precise positioning stage run in two directions within a horizontal plane was presented.Based on the analysis of the working principle of stick-slip mechanism,a mathematical model describing its dynamic behavior was set up and simulated,experiments of traveling performance and bearing ability on the prototype were conducted.The results show that the designed stage has the advantages in simple structure,small volume,light weight,stable step size and large working range.As the driving voltage is below 30 V,the step error is less than 0.5μm.The bearing ability of the stage is approximately 7~8 times its own mass.
【Fund】: 国家自然科学基金资助项目(No.50475010);; 高等学校博士学科点专项科研基金资助项目(No.20050183020);; 长春市科技局“新星创业计划”资助项目(No.04-08XC279)
【CateGory Index】: TN384
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