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《Optics and Precision Engineering》 2006-04
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Study on outer driving precision PZT linear step actuator

YANG Shu-chen~(1,2),LIU Jian-fang~2,YANG Zhi-gang~2,ZHAO Hong-wei~2(1.Jilin Teachers' Institute of Engineering and Technology,Changchun,130052,China;2.College of Mechanical Science and Engineering,Jilin University,Changchun 130025,China)  
A new precision linear PZT actuator was proposed to improve its drive capabilities.Based on the piezoelectric(PZT) technology,this paper adopts the principle of bionics and works with a new method of stator initiative anchoring/loosen and a distortion structure of double-side thin flexible hinge to solved the problems of anchoring/loosen,frequency,travelling,resolution and velocity.The experimental results show that the new linear PZT actuator has high frequency(100 Hz),high speed(30 mm/min),large travelling(10 mm),high resolution(0.05 μm) and high load(100 N),it can be applied for large travelling and high resolution driving device,optics engineering,precision positioning and some micro-manipulation field.
【Fund】: 国家自然科学基金资助(No.50475010);; 吉林大学研究生创新基金资助(No.401004)
【CateGory Index】: TM921.5
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