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《Optics and Precision Engineering》 2007-06
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Micro electromagnetic actuator with high energy density based on MEMS technology

ZHANG Tao1,2,WU Yi-hui1,LI Hai-wen1,LIU Bo1,2,ZHANG Ping1,WANG Shu-rong1 (1.National Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China)  
A fabricating technology for high energy density micro electromagnetic actuator based on Micro Electron Mechanics System(MEMS) is introduced.The main steps on MEMS technology are as follows: Firstly,etching plating trenches of multi-turn double planar microcoils and permalloy(NiFe) core into silicon wafers prior to electrode position,a seed layer of copper must is deposited on the wafer;secondly,when the thick of seed layer reaches to about 20 μm by electroplating,peeling the surface plating on the wafer and coating the core by photoresist,electroplating the coil in the groove;thirdly,when the coil groove is filled with copper,coating the coils and electroplating permally core.In the 10 mm×10 mm×0.38 mm square silicon wafer,a high energy density electromagnetic microactuator,composed of multi-turn double planar microcoils(22×2 turns,section of copper wire is 60 μm×60 μm,length is 1 164 mm) and permalloy core(3 mm×3 mm×0.2 mm),is fabricated.Finally,the estimated force produced by the integrated electromagnetic microactuator is around 50 mN at a sinusoidal current amplitude of 0.3 A,which is fabricated and tested on the valveless micropump.Experiment results show the microactuator is efficient in producing large magnetic force and flexible in application.
【Fund】: 国家自然科学基金资助项目(No.60574089)
【CateGory Index】: TN42
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