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《Optics and Precision Engineering》 2007-06
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Dynamic performance of inchworm-type piezoelectric linear actuator

ZHAO Hong-wei,WU Bo-da,HUA Shun-ming,YANG Zhi-gang,CHENG Guang-ming,QU Xing-tian (College of Mechanical Science and Technology,Jilin University,Changchun 130025,China)  
The structure and working principle of a inchwormtype piezoelectric linear actuator are analyzed,and the mechanical system dynamic modal of the actuator is established.Based on the analysis of the actuator's stator,the output performance of proposed actuator is analyzed,experimental results show that the output displacement of the actuator is stable,and the displacement for single step is 9.8 μm when the actuating voltage is 100 V.The velocity and acceleration properties of the linear actuator are tested.According to the testing results,the dynamic response performance of the actuator is analyzed deeply.The experimental results show that the proposed piezoelectric linear actuator has good dynamic performance and motion stability.
【Fund】: 国家“863”计划资助项目(No.2002AA423150);; 国家自然科学基金资助项目(No.50475010);; 高等学校博士点专项科研基金资助项目(No.20050183020)
【CateGory Index】: TN384
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