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《Optics and Precision Engineering》 2007-06
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A novel differential piezoelectric accelerating sensor

LIU Jun,QIN Lan,LIU Jing-cheng,LI Min (Key Laboratory of Optoelectronic Technology & Systems,the Ministry of Education,Chongqing 400044,China)  
A novel differential piezoelectric acceleration sensor was introduced.The sensor's structure and operating principle were presented and its mathematic model was established,then the relationship between the sensor's output characteristic and inertial mass and the piezoelectric components was discussed.Finally,the process circuit structure of sensor and its characteristic were discussed also.Experimental results show that the sensor with one inertial mass can realize the differential measurement of acceleration signals, and it has advantages in simple structure,light weight,simple for working and manufacturing,and better anti-interference ability.Its linearity is up to 0.1%,which is half of common accelerometer.It has satisfied the design purpose in frequency response error of 1% and repeatability of 1.27%,and its measurement sensitivity is twice of general accelerometer.
【Fund】: 重庆市自然科学基金资助项目(No.8597)
【CateGory Index】: TP212.1
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