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《Optics and Precision Engineering》 2007-09
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Curvature measurement of micro cantilever based on phase-stepping microscopic interferometry

HUANG Yu-bo1,LI Da-chao1,HU Xiao-tang1,FU Xing1,ZHANG Wen-dong2,HU Chun-guang1(1.State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China;2.National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China)  
A curvature measurement method based on microscopic interferometry and finite difference method is proposed to extract the curvature of micro cantilevers accurately.In comparison of the measured vertical height data obtained via microscopic interferometry with the modeled data from finite difference method,the best fitted value of curvature is obtained employing quasiNewton search algorithm or least square method.The experimental results show that precise curvature value can be obtained within rms 1.5 nm,and if measurement is not taken at the actual beginning of the beam but with pixels of offset in the direction of the beam length,the result of curvature is hardly influenced.Experimental results also show the method is very practical in MEMS measurement of residual stress and stress gradient using microscopic interferometry to provide high resolution and accuracy and nonzero boundary condition to refine the beam model.
【Fund】: 国家自然科学基金资助项目(No.50535030)
【CateGory Index】: TH744.3
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