Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Optics and Precision Engineering》 2007-12
Add to Favorite Get Latest Update

AFM based femto-second laser nanofabrication of PMMA

HUANG Wen-hao1,ZHU Lan-fang1,CHEN Yu-hang1,YAN Feng2,ZHOU Ming2,WANG Xiang1(1.Department of Precision Machinery and Instrumentation,University of Science and Technology of China,Hefei 230027,China;2.School of Material Science and Engineering,Jiangsu University,Zhenjiang 212013,China)  
A new nano-process technique beyond conventional optical lithography was introduced.As the main mechanisms,field enhancement effect was discussed.Using Finite Difference Time Domain method(FDTD),the near-field optical distribution of metallic tips was simulated.Nanofabrication on PMMA surfaces using an Atomic Force Microscope(AFM) tip under femto-second laser irradiation was investigated.Various lines and letters of different widths were processed,then fabricated patterns were tested by the same AFM tip in situ.Without optimization of the laser parameters,100 nm resolution which is better than far field fabrication of our research group(~200 nm) was obtained.
【Fund】: 国家自然科学基金资助项目(No50335050);; 国家863高技术计划资助项目(No2006AA04Z311)
【CateGory Index】: TG665
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 6 Hits
1 MAHIRA Mustahkim PALIHATI Mijiti (School of Physics Science and Technology,Xinjiang University,Urumqi 830046,China);Dynamics of Femtosecond Lasers with a Saturable Absorber[J];Optics & Optoelectronic Technology;2010-05
2 LIU Yong,ZENG Yong-bin,ZHU Di,HUANG Shao-fu,Wang Shao-hua(College of Mechanical Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China);Real-time control and data acquisition system for 3D micro electrochemical milling[J];Optics and Precision Engineering;2010-06
3 XU Bin1,WU Xiao-yu1,LUO Feng1,DU Chen-lin2,SUN Xiu-quan2(1.Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die,College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518060,China;2.Shenzhen Key Laboratory of Laser Engineering,College of Electronic Science and Technology,Shenzhen University,Shenzhen 518060,China);Ablation of 0Cr18Ni9 stainless steel films by femtosecond laser[J];Optics and Precision Engineering;2012-01
4 ZHANG Zhao-yang,LI Zhong-yang,WANG Yao-min,MAO Wei-ping(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China);Mechanical-electrochemical micro-etching under laser shock effect[J];Optics and Precision Engineering;2012-06
5 CHENG Bai;HAN Bing;GU Li-shan;CHEN Xiao-ping;YANG Li-jun;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences;College of Mechaelectrical Engineering,Harbin Institute of Technology;;Nanostructure machining by AFM probe combined with continuous laser[J];Optics and Precision Engineering;2015-07
6 CUI Yan1,2,ZHANG Lüquan1,XIA Jinsong1,WANG Liding1 (1.Key Laboratory for Micro-Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China;2.Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116024,China);Fabrication of Novel Piezoelectric Micro-Cantilever Probe[J];Journal of Xi'an Jiaotong University;2011-01
【Citations】
Chinese Journal Full-text Database 4 Hits
1 JIANG Zhong wei 1, YUAN Da jun 1, ZHU An ding 1,XIA An dong 1,2 , HUANG Wen hao 1, CHU Jia ru 1, LIU Yun ping 1 (1. Precise Machinery and Precise Instrument Department, USTC, Hefei 230026, China; 2. State Key Lab of Molecular Reaction Dynamics, CAS, Beijing 100080, China);2-photon 3-D microfabrication technology and its experimental system[J];Optics and Precision Engineering;2003-03
2 GONG Xiao-jing1,CHU Jia-ru1,YANG Jian-jun2,ZHANG Tie-qun2,ZHU Xiao-nong2 (1.Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China;2.Key Laboratory of Opto-electronic Information Science and Technology,Ministry of Education,Institute of Modern Optics,Nankai University,Tianjin 300071,China);An improved way for fabricating micro-waveguide by femtosecond laser[J];Optics and Precision Engineering;2007-01
3 DONG Xian-zi,DUAN Xuan-ming (Laboratory of Organic NanoPhotonics,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing 100080,China);High speed two-photon laser nanofabrication of three-dimensional microstructures[J];Optics and Precision Engineering;2007-04
4 ZHU Jiang-Feng WEI Zhi-Yi (Key Laboratory of Optical Physics,Institute of Physics,Chinese Academy of Sciences, Beijing 100080,China);Femtosecond laser micro-nano fabrication[J];Physics;2006-08
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 ZHANG Chengyun (College of Physics and Electrical Engineering,Guangzhou University,Guangzhou 510006);The Lastest Development of Metal Surface Structure Induced by Femtosecond Laser[J];Materials Review;2010-S2
2 DONG Xian-zi1,2,ZHAO Zhen-sheng1,DUAN Xuan-ming1(1 Laboratory of Organic NanoPhotonics and Key Laboratory of Photochemical Conversion & Optoelectronic Materials,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing 100190,China;2 Graduate School of Chinese Academy of Sciences,Beijing 100190,China);Gradient Quasidiamond Lattice Photonic Crystal Fabricated by Two-photon Polymerization Nanofabrication[J];Journal of Materials Engineering;2008-10
3 JIN Wei1,2,DONG Xian-zi1,ZHAO Zhen-sheng1,DUAN Xuan-ming1(1 Key Laboratory of Functional Crystals and Laser Technology, Chinese Academy of Sciences,Beijing 100190,China; 2 Graduate University of Chinese Academy of Sciences,Beijing 100190,China);Effects of Laser Scanning Conditions on Metallic Micro/Nanostructures in Multiphoton Nanofabrication[J];Journal of Materials Engineering;2011-12
4 LIU Li-peng, ZHOU Ming, DAI Qi-xun, PAN Chuan-peng, CAI Lan (Center for Photon Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, China);Three-dimensional micro-fabrication by femtosecond laser[J];Opto-electronic Engineering;2005-04
5 ZHU An-ding,LIU Yu-xiang,GUO Rui,XIAO Shi-zhou,HUANG Wen-hao (Department of Precision Machinery and Instrumentation, USTC, Hefei 230026, China);Micro-rotor fabricated and rotated by laser[J];Opto-Electronic Engineering;2006-01
6 WANG Jing jing, YAN Hong, DENG Yu jun, LI Hong dong, ZHANG Yu feng, ZHANG Fan, XIA Zong ju, GAO Qiao jun, ZOU Ying hua (Department of Physic, Mesoscopic physics Laboratory, Peking University, Beijing 100871, China);The Experimental Setup for Near-field Raman Spectroscope and the Near-field Raman Spectroscopy of CVD-diamond Films[J];Chinese Journal of Light Scattering;2001-01
7 SU Ya-hui~1,CHEN Yu-hang~1,DONG Lei~2,ZHENG Zhi-jun~3,GUO Rui~1,XIAO Shi-zhou~1,HUANG Wen-hao~1(1.Precise Machinery and Precise Instrument Department,University of Science and Technology of China,Hefei,230026,China;2.Nanostructure and Nanophysics Laboratory,University of Science and Technology of China,Hefei,230022,China;3.Laboratory for Materials Behavior & Design University of Science and Technology of China,Hefei,230026,China);Measuring and analyzing elastic modulus of single voxels by femo-second two-photon photopolymerization[J];Optics and Precision Engineering;2006-04
8 GONG Xiao-jing1,CHU Jia-ru1,YANG Jian-jun2,ZHANG Tie-qun2,ZHU Xiao-nong2 (1.Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China;2.Key Laboratory of Opto-electronic Information Science and Technology,Ministry of Education,Institute of Modern Optics,Nankai University,Tianjin 300071,China);An improved way for fabricating micro-waveguide by femtosecond laser[J];Optics and Precision Engineering;2007-01
9 WANG Xiang,ZHAO Gang,MA De-sheng,HUANG Wen-hao(Department of Precision Machinery & Precision Instrument,University of Science & Technology of China,Hefei 230026,China);Optimization of solidification process parameters in micro stereo lithography[J];Optics and Precision Engineering;2007-04
10 LIU Cheng-you1,NING Dan1,WANG Rui-ting2,NI Zheng-guo3(1.Department of Physics,Tonghua Normal College,Tonghua 134002,China; 2.College of Mathematics,Jilin University,Changchun 130022,China;3.Institute of Military Simulation Technology,Aviation University of Air Fore,Changchun 130022,China);Fabrication and optical properties of three-dimensional Ta_2O_5/SiO_2 photonic crystal[J];Optics and Precision Engineering;2007-10
China Proceedings of conference Full-text Database 2 Hits
1 SUN Xiao-yan1,2, HU You-wang1,2, DUAN Ji-an1,2 (1. School of Mechanical and Electronical Engineeing, Central South University, Changsha 410083, China; 2. Key Laboratory of Modern Complex Equipment Design and Extreme Manufacturing,Ministry of Education, Central South University,Changsha,410083, China);The research progress of femtosecond laser written photonic devices[A];[C];2009
2 TAN Wen-jiang WANG Yu-xiao SONG Ying-lin (Harbin Institute of Teachnology Department of Physics,Harbin 150001,China);Discussion of different nonlinear absorbtion by nondegenerate pump-probe measurments[A];[C];2007
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 JIA Cui-ping, DONG Wei, XU Bao-kun, PAN Jian-xuan, ZHOU Jing-ran, CHEN Wei-you (State Key Lab on Integrate Optoelectronics, College of Electronic Sciences & Engineering, Jilin University, Changchun 130012, China);Study on the Characteristics of the (110) Silicon Etched in KOH Solution[J];Semiconductor Technology;2005-06
2 Shi Erlei a,Cui Yan a,b,Xia Jinsong a,Wang Liding a(a.Key Laboratory for Micro/Nano Technology and System of Liaoning Province;b.Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology,Dalian 116023,China);Fabrication of Nano-Silicon-Tips Based on Anisotropic Wet Etching Technique[J];Micronanoelectronic Technology;2008-12
3 Jiang Yanfeng1,Huang Qing' an1,Wu Wengang2 ,Hao Yilong2 and Yang Zhenchuan2 ( 1Microelectronics Center,Southeast University,N anjing 2 10 0 96 ,China) ( 2 Institute of Microelectronics,Peking University,Beijing 10 0 871,China);A Physical Model for Silicon Anisotropic Etching in KOH[J];Chinese Journal of Semiconductors;2002-04
4 Zhang Xin’an 1,2,,Zhang Jingwen2,Yang Xiaodong2,Lou Hui1, Liu Zhenling2,Zhang Weifeng1,and Hou Xun 1,2(1 School of Physics and Photoelectronics,Henan University,Kaifeng 475001,China) (2 Key Laboratory of Photonics Technology for Information of Shanxi Province,Xi’an Jiaotong University,Xi’an 710049,China);Fabrication of ZnO Thin-Film Transistors by L-MBE*[J];Chinese Journal of Semiconductors;2006-06
5 ZHAO Gang, CHU Jia-ru (Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China);Structural Design of Novel Micro Piezoelectric Cantilevers with Low Stiffness and High Resonance Frequency[J];Chinese Journal of Sensors and Actuators;2006-05
6 LIU Qing-gang~ 1* , HE Bo-tao~1, ZHANG Chao-yan~1, QI Sen~1, ZHANG Shi-lin~2, HU Xiao-tang~1 1.State key Lab of Precision Measuring Technology & Instrument, Tianjin University, Tianjin 300072,China; 2.Department of Electronic Information Engineering, Tianjin University, Tianjin 300072,China;Pulse Duration of AFM Induced Oxidation and Si Nano-Fabrication[J];Chinese Journal of Sensors and Actuators;2006-05
7 YAN Yong-da, SUN Tao, DONG Shen (Harbin Institute of Technology, Harbin 150001,China);Fabrication of Micro/nano Structures Using Mechanical Scratching Method with AFM Tip[J];Chinese Journal of Sensors and Actuators;2006-05
8 ZHOU Ming,FAN Xiao-meng,YAN Feng,LI Jian,WANG Jing-jing,CAI Lan(School of materials science and engineering,Jiangsu University,Zhenjiang 212013,China);Reproducibility of Nanofabrication on Thin Polymethyl Methacrylate Film by Tip-enhancement Effect[J];Journal of Materials Science and Engineering;2010-06
9 Harbin Institute of Technology TIAN Xiu bo;Pressure variable Ultrasonic Plastic welder[J];ELECTRIC WELDING MACHINE;1999-12
10 Shi Qun Wang Xiaochun;Study on Interpolating Algorithm in CNC Using Stepping Servo System[J];Electric Drive;2005-03
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 ZHANG Zhao-yang,LI Zhong-yang,WANG Yao-min,MAO Wei-ping(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China);Mechanical-electrochemical micro-etching under laser shock effect[J];Optics and Precision Engineering;2012-06
2 XU Bin1,WU Xiao-yu1,LING Shi-quan1,WU Shi-yun1,LUO Feng1,DU Chen-lin2,SUN Xiu-quan2(1.Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die, College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518060,China; 2.Shenzhen Key Laboratory of Laser Engineering,College of Electronic Science and Technology, Shenzhen University,Shenzhen 518060 China);Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding[J];Optics and Precision Engineering;2012-08
3 ZHANG Zhao-hai;XIAO Wen;PAN Feng;CONG Lin;ZHANG Xin;School of Instrumentation Science and Opto-electronics Engineering,Beihang University;;Real-time micro-vibration multi-spot synchronous measurement within a region based on digital holographic interferometry[J];Journal of Optoelectronics.Laser;2013-11
4 CHENG Ping;WEI Di;WU Ben-ke;GAO Feng;CHEN Xiang-dong;School of Electronic Science and Applied Physics,Hefei University of Technology;;Femtosecond laser precision machining of biodegradable heart stent[J];Optics and Precision Engineering;2014-01
5 LIU Yong;ZENG Yong-bin;Associated Engineering Research Center of Mechanics & Mechatronic Equipment,Shandong University;College of Mechanical and Electrical Engineering,Nanjing University ofAeronautics and Astronautics;;Electrochemical drilling of deep and small holes with high speed micro electrode[J];Optics and Precision Engineering;2014-03
6 MENG;Ling-chao;ZENG Yong-bin;QU Ning-song;ZHU Di;College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics &Astronautics;Jiangsu Laboratory of Precision and Micro-manufacturing Technology;;Electrical conductivity of carbon nanotube tool electrodes[J];Optics and Precision Engineering;2014-03
7 ZHONG Jin-ming;WU Xiao-yu;XU Bin;LUO Feng;LI Ji-bin;RUAN Shuang-chen;Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die,College of Mechatronics and Control Engineering,Shenzhen University;Key Laboratory of Advanced Optical Precision Manufacturing Technology of Guangdong Higher Education Institutes,Shenzhen University;;Laminated fabrication of micro-mold based on WEDM and thermal diffusion welding[J];Optics and Precision Engineering;2015-04
8 CHENG Bai;HAN Bing;GU Li-shan;CHEN Xiao-ping;YANG Li-jun;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences;College of Mechaelectrical Engineering,Harbin Institute of Technology;;Nanostructure machining by AFM probe combined with continuous laser[J];Optics and Precision Engineering;2015-07
9 KONG Quan-cun;LIU Guo-dong;LI Yong;ZHOU Kai;Department of Mechanical Engineering,Beijing Key Laboratory of Precision/Ultra-precision Manufacturing Equipment and Control,Tsinghua University;School of Instrumentation Science and Opto-electronics Engineering,Beijing Information Science & Technology University;;Preparation of hollow electrode used for micro ECM[J];Optics and Precision Engineering;2015-10
10 MAO Weiping;DING Wei;ZHANG Zhaoyang;ZENG Yongbin;QIN Changliang;Institute of Laser Technology,School of Mechanical Engineering,Jiangsu University;Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology,Nanjing University of Aeronautics and Astronautics;;Detection and experiment of shock cavitations of laser electrochemical composite processing[J];Laser Technology;2014-06
【Secondary Citations】
Chinese Journal Full-text Database 4 Hits
1 LI Feng-you,LI Hong-jun, LU Zhen-wu, LIAO Jiang-hong (State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China);Focused spot shaping in laser writing system[J];Optics and Precision Engineering;2001-01
2 CHEN Rong_gang 1,2 ,SHEN Jian_hua 2, HUANG Wen_hao 1 (1. Department of Precision Machinery and Instrumentation, University of Science and Technology of China, Hefei 230026, China; 2. The Third Department, PLA Artillery Academy, Hefei 230031,Chi;Design and manufacture of the intelligent precision platform for a laser processing system[J];Optics and Precision Engineering;2002-03
3 JIANG Zhong wei 1, YUAN Da jun 1, ZHU An ding 1,XIA An dong 1,2 , HUANG Wen hao 1, CHU Jia ru 1, LIU Yun ping 1 (1. Precise Machinery and Precise Instrument Department, USTC, Hefei 230026, China; 2. State Key Lab of Molecular Reaction Dynamics, CAS, Beijing 100080, China);2-photon 3-D microfabrication technology and its experimental system[J];Optics and Precision Engineering;2003-03
4 CHEN De Qiang XIA An Dong WANG Ke Yi HUANG Wen Hao (Department of Precision Machinery and Instrumentation,University of Science and Technology of China,Hefei 230026);TWO-PHOTON LASER SCANNING FLUORESCENCE MICROSCOPY AND ITS APPLICATIONS[J];PHYSICS;2000-04
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved