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《Optics and Precision Engineering》 2008-05
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Mechanical coupling error of silicon microgyroscope

SHI Qin,QIU An-ping,SU Yan,ZHU Xin-hua (School of Mechanical Engineering,Nanjing University of Science &Technology,Nanjing 210094,China)  
The mechanism of mechanical coupling errors of silicon microgyroscopes was studied.For a imperfect machining,the errors caused by the anisoelasticity,asymmetrical damping and the unbalanced mass of a type of z-axis silicon microgyroscope were analysed based on the dynamic equations and matrix theory.The mathematic models of mechanical coupling errors were put forward,and the numerical results of mechanical coupling errors were given.Analysed results show that the mechanical coupling errors consist of errors in-phase with the useful signals and quadrature errors,and quadrature errors are the largest one,which come from the asymmetrical damping.Finally,the test results show that the quadrature error of a z-axis silicon microgyrscope is 342.59 °/s,which is in accordance with the analytic results.It suggests that restraining and compensating quadrature errors is one of the key technologies to decrease mechanical coupling errors.
【Fund】: 国家自然科学基金资助项目(No.10572039);; 江苏省自然科学基金资助项目(No.BK2005064)
【CateGory Index】: V241.5;TH161
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