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《Optics and Precision Engineering》 2012-12
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Correction of crosstalk and fake signal trigger of EUV imager

WANG Xiao-dong1,ZHU Xiao-ming1,2,L Bao-lin1,LIU Wen-guang1(1.Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China; 2.University of Chinese Academy of Sciences,Beijing 100039,China)  
In order to improve the resolution of an Extreme Ultraviolet(EUV) photon counting imager,this paper analyzed the influence of the crosstalk between Wedge Strip Zigzag(WSZ) anodes and the false trigger resulted from out-range signals on image quality.First,the reasons which caused the crosstalk were analyzed,and the range of crosstalk coefficient and its optimum value were determined by measuring interelectrode capacitance.Then,the crosstalk coefficient was used to process photons and determine a proper energy interval(upper and lower limit).Finally,the image obtained in the setting energy interval was compared with an original image.The comparison shows that the image quality has been improved obviously.The results demonstrate that the image edge becomes stronger further and image resolution is improved by eliminating the crosstalk between WSZ anodes and removing fake data from real data.
【Fund】: 国家自然科学基金资助项目(No.60677043);; 科技部国际合作项目(No.2011DFA50590)
【CateGory Index】: TH74
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