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《Optics and Precision Engineering》 2014-04
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Irregular image adaptive focusing system for diffraction grating

WANG Wei;LI Dong-jian;LI Hong-guang;WANG Zheng-zhou;CAO Shi-kang;Xi′an Institute of Optics and Precision Mechanics Chinese Academy of Sciences;  
The characteristics of faculae for a larger diameter diffraction grating were analyzed,and different problems and their processing methods in self-adaptive auto-focusing of irregular images for the diffraction grating were discussed.A group of methods to control the auto-focusing of the irregular facula of the diffraction grating were proposed and a self-adaptive auto-focusing device were developed to achieve the offline detection of sampling distance and sampling angle for the diffraction grating.By optimizing threshold theory,the image was divided into two parts,facula area and background.On the basis of the mathematical morphology theory,the facula area,major and minor axis lengths and image center were calculated.Then,the adaptive focusing methods were implemented by analyzing the corresponding relationship between image center position and leveling motor,the lengths of major and minor axes and the axial motor.Finally,focusing iteration and centroid search were performed by combining the area minimization with the golden section algorithm.Test results show that the standard deviation of sampling distance is 412.5μm and that of sampling angle is 10.35″,which meets the requirements for sampling distance and sampling angle less than 1 000μm and 30″,respectively.This device is characterized by simple structure,high reliability,strong anti-in-terference ability,and has been applied in a large aperture diffraction grating comprehensive diagnosis platform.
【Fund】: 国家重大专项
【CateGory Index】: TP391.41
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