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Application of Laser Photoforming Technology in Machining of micromachines

Shen Lianguan;Wang Xiang and;Den Yimi(Dept.of Precision Machinery & Instrumentation,Univ.of Scie.&Tech.of China,Hefei 230026)  
The machining methods and technology of micro-machines currently applied in the worldare briely introduced foundamental princile of Iaser photoforming technology and itsapplication in machining of micromachines are presented.The paper also looks into its futureresearch and application trends.
【Fund】: 中国科学技术大学青年基金
【CateGory Index】: TN249
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