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《OPTICS AND PRECISION ENGINEERING》 1996-02
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Development and Applications or New Micro-motion Actuators

Wu Yihui; Wang Liding and Ma Jianxu(Changchun Institute of Optics & Fine Mechanics,Chinese Academy of Soiences, Changchun 130022 )  
The characters of several new types of micro-motion actuators is analyzed and theirapplications in some advanced fields, such as MEMS and Nanotechnology is introduced inthis paper.
【CateGory Index】: TH703.8
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