Full-Text Search：
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《OPTICS AND PRECISION ENGINEERING》 1998-01
Add to Favorite Get Latest Update

Microtechnology/Nanotechnology and MEMS

ZHOU Zhaog Ying,YE Xiong Ying,CUI Tian Hong,ZHANG Lian (Dept.of Precision Instruments and Mechanology of Tsinghua University,Beijing 100084)  
MEMS and micro machine technology is a developing field.This paper deals with the process of microtechnology/nanotechnology,micro machining,the concept and main topic of MEMS and other fields.
【CateGory Index】： TP271.4
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【References】
Chinese Journal Full-text Database 8 Hits
1 GUO Zhen-shan,WANG Shi-bin*,LI Lin-an,JIA Hai-kun,MEN Yu-tao,HE Wei (Mechanics Department,Tianjin University,Tianjin 300072,China);Stability of nano-scale thin metal films under tension[J];光学精密工程;2011-09
2 SHE Dong-sheng2,WANG Xiao-dong1,2,ZHANG Xi-wen2,WANG Li-ding1,2 (1.Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education,Dalian University of Technology,Dalian 116024,China. 2.Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian 116024,China);Dynamic testing of MEMS micro-structure and its measurement system at low temperatures[J];光学精密工程;2010-10
3 HU Jie,XUE Chen-yang,ZHANG Wen-dong,XIONG Ji-jun,ZHANG Bin-zhen (National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China);Research of a Micro Accelerometer Based on GaAs Resonant Tunneling Structure[J];微纳电子技术;2007-Z1
4 ZHAO Mei-rong,HU Chang-de,LIN Yu-chi(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University 300072,China);Precision Driving Power of Piezoelectric Motor with Nanometer Step[J];压电与声光;2007-02
5 LIU Ben-dong1,LI De-sheng1,YANG Xiao-bo2(1.College of Mechanical Engineering and Applied Electronics Technology,Beijing University of Technology,Beijing 100022,China;2.Beijing Vocational College of Agriculture,Beijing 102208,China);Research of a monostabillity micro electromagnetic relay[J];光学精密工程;2007-04
6 ZHANG Zhi-jie, YUAN Yi-bao, YU Wen(Department of Automation Measurement & Control and Instrumentation, Harbin Institute of Technology, Harbin 150001, China);Design Calculation and Analysis of Half Elliptical Flexure Hinge[J];机械设计与研究;2007-01
7 LIU Ze-wen,XUAN Yun,LEI Xiao-feng, LI Zhi-jian, LIU Li-tian (Institute of Microelectronics of Tsinghua University, Beijing 100084, China);Design and measurement of RF-MEMS CPW on HRS[J];光学精密工程;2005-02
8 Zhao Meirong Wen Limei Lin Yuchi Zhang Yuxiang (State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjing 300072);PIEZOELECTRIC MOTOR WITH LONG-RANGE AND NANO-STEP[J];机械工程学报;2004-08
China Proceedings of conference Full-text Database 3 Hits
1 XIN Hong-bing (School of Mechanical Engineering and Automation, Beijing Technology and Business University, Beijing 100037);RELIABILITY DESIGN FOR FLEXIBLE HINGES[A];[C];2006
2 HU Jie XUE Chen-yang ZHANG Wen-dong XIONG Ji-jun ZHANG Bin-zhen (National Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China);Research of a Micro Accelerometer Based on GaAs Resonant Tunneling Structure[A];[C];2007
3 Qi Yongyue Zhao Meirong Lin Yuchi (State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China);Review on Nano-measuring System[A];[C];2003
【Citations】
Chinese Journal Full-text Database 1 Hits
1 Zhou,Zhao-ying;Ye,Xiong-ying;Hu,Min;You,Zheng(Tsinghua University);Advance in Micro Electro Mechanical Systems[J];仪器仪表学报;1996-S1
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 Zhang Dongfeng Kong Deyi Mei Tao Tao Yongchun (State Key Laboratory of Transducer Technology,Institute of Intelligent Machines,CAS,Hefei 230031,China);Present Status and Prospect of the Miniaturized Ion Mobility Spectrometry[J];仪器仪表学报;2006-02
2 WANG Ya-zhen ZHU Wen-jian (College of Mechanical Engineering,South China University of Technology,Guangzhou 510640,China);MEMS Technology and Developing Trend[J];机械设计与研究;2004-01
3 ;Research on MEMS and its Application[J];测控技术;2002-08
4 CAI Gan wei 1, WANG Wen long 2, LIU Ping 1, ZHU Cong yun 2 (1.Dept. of Mechanical Eng. of Xiangtan Polytechnic University, Xiangtan 411201, China;2.School of Mech.Sci.&Eng.,HUST,Wuhan 430074, China);Study on the dynamics of micromachine[J];湘潭矿业学院学报;2002-01
5 Department of Instruction Engineering, Shanghai Jiaotong University, 200030 Zhang Fang Lin Liangming [;Basic characteristic, key technology and application prospect of MEMS[J];传动技术;2001-01
6 Gong Qiulian Zhou Zhaoying Wang Xiaohao Zhang Wendong Xia yi Department of Precision Instruments & Mechanology .Tsinghua University;The Fabrication and Test of Magnetic Driver for Micro Pump[J];测试技术学报;1998-03
7 ZHOU Zhaog Ying,YE Xiong Ying,CUI Tian Hong,ZHANG Lian (Dept.of Precision Instruments and Mechanology of Tsinghua University,Beijing 100084);Microtechnology/Nanotechnology and MEMS[J];光学精密工程;1998-01
8 Liu Jing Shi Gengchen (Department 8 of Beijing Institute of Technology,100081);Microelectromechanical System (MEMS) Technology and Its Application in Fuzes[J];现代引信;1997-03
9 Li Luming,Ren Yantong,Wang Liding,Shao Peige (Changchun Institue of Optics and Fine Mechanics, Chinese Academy of Sciences,Changchun 130022);Development of Microgripper Technique[J];光学精密工程;1997-04
10 Yuan Weizheng Li xiaoying (Northwestern Polytechnical University, Xi′an 710072);Micro machine and Micro fabrication Technology[J];机械科学与技术;1997-03
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 YOU Zheng, ZHANG Gao-fei, LIN Yang,REN Da-hai(Department of Precision Instruments and Mechanology, Tsinghua University,Beijing 100084, China);Design and modeling of MEMS-based solid propellant propulsion[J];光学精密工程;2005-02
2 LIU Ze-wen, WEI Jia, WANG Yu, FANG Jie,LIU Li-tian,LI Zhi-jian(Institute of Microelectronics, Tsinghua University, Beijing 100084, China);Analysis and optimization of a side pull-down electrodes controlled MEMS varactor[J];光学精密工程;2005-02
3 LI Sheng-yi, LIU Zong-lin, WU Xue-zhong (College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China);Developments of Microaccelerometer Research[J];国防科技大学学报;2004-06
4 Zhao Meirong Wen Limei Lin Yuchi Zhang Yuxiang (State Key Laboratory of Precision Measuring Technology and Instrument, Tianjin University, Tianjing 300072);PIEZOELECTRIC MOTOR WITH LONG-RANGE AND NANO-STEP[J];机械工程学报;2004-08
5 Li Fuliang Zhang Hui School of instrumentation, Hefei University of Technology, Hefei 230009;A New Drive Power Supply for Piezoelectric Ceramic Based on PA85[J];电子质量;2004-01
6 LI Wei SHI Yanling XIN Peishe ng ZHU Ziqiang LAI Zongsheng (Department of E.E., East Ch ina Normal University, Shanghai, 200062, CHN);Loss Performance of CPW with Thick Polyimide on Low-resistivity Si[J];固体电子学研究与进展;2003-03
7 LI Zhi, WANG Xiang-jun (National Laboratory of Precision Measurement Technology and Instruments,College of Precision Instrument and Opto-electronic Engineering, Tianjin University, Tianjin 300072, China);MEMS measurement technologies and methods[J];光学精密工程;2003-01
8 Zhang Yufeng Zhang Pengfei L i Desheng Wang Donghong (Dept.of Automatic Testand Control,H arbin Institute of Technology,H arbin15 0 0 0 1);A Novel Micro Electromagnetic Relay Based On MEMS Technology[J];仪器仪表学报;2001-S1
9 Zhang Siming;Summarization of Micro-special Motor New Principle and New Construction at Home and Abroad[J];电子元器件应用;2001-Z1
10 Zeng Lingru;21 Century nanometre technolgy[J];宇航计测技术;2000-01
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 LI Jian-jun;XI Ye;WANG Qun;School of Electronic Science & Applied Physics,Hefei University of Technology,Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province;;RF MEMS Tunable Stop-filter on Coplanar Waveguide[J];仪表技术与传感器;2016-09
2 QU Jianjun;GUO Wenfeng;HU Zhiyong;WANG Peiming;School of Mechatronics Engineering,Harbin Institute of Technology;Aerospace Dongfanghong Satellite Corporation;;Mathematical Model and Simulation of a Kind of Inverse Piezoelectric Linear Inchworm Motor[J];机械工程学报;2015-18
3 KONG De-jun;FU Gui-zhong;GUO Hao-yuan;College of Mechanical Engineering,Changzhou University;;Interface diffusion mechanism and binding strength of TiAlCN coatings[J];光学精密工程;2014-05
4 DU Jian-hua;LIU Yan-wei;LI Yuan-yuan;Department of Scientific Research,Academy of Armored Force Engineering;School of Material Science and Engineering,University of Science and Technology Beijing;;Friction properties of Cu-based friction materials reinforced by nanometer materials[J];光学精密工程;2013-10
5 LIU Lei,ZHANG Gao-fei,YOU Zheng(Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);Research on effect of environmental temperature on RF-MEMS switch pull-in voltage[J];传感器与微系统;2013-05
6 LI Yi-quan,SHI Qing-yong,YU Hua-dong,YU Zhan-jiang(Department of Mechanical Engineering,Changchun University of Science and Technology,Changchun 130022,China);Design of Elastic Element with Double Parallel Spring for Micro-Friction Test[J];仪表技术与传感器;2012-12
7 CUI Yan1,WANG Fei1,DONG Wei-jie2,YAO Ming-lei1,WANG Li-ding1(1.Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education,Dalian Vniversity of Technology,Dalian 116024,China; 2.School of Electron Science and Technology,Dalian University of Technology,Dalian 116024,China);Nonlinear piezoelectric energy harvester[J];光学精密工程;2012-12
8 HU Changde①,FU Peng②,MIN Heping②,MAO Anding②,DENG Xiaolin② ①Department of Non-commissioned Officer,the Academy of Equipment Command & Technology,Beijing 102200,CHN;②Equipment Repairing Group of Tibet Military Area Command,Lasa 850000,CHN;Study on a kind of the rotary stepping piezoelectric micro-platform[J];制造技术与机床;2012-09
9 Ren Ning1,Ou Kailiang1,Wang Changlu1,Zhou Feng2(1 Zhengzhou Research Institute of Mechanical Engineering,Zhengzhou 450052; 2 Zhengzhou Total Solution Company Offshore Equipment Co.Ltd,Zhengzhou 450001);Calculation and Analysis of the Rigidity for Parabola-rectangle Flexural Hinges[J];机械科学与技术;2012-08
10 ZHANG Yachao,ZHAO Meirong,LIN Yuchi(State Key Lab.of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China);Piezoelectric Micro-angle Rotary Actuator and Close-loop Control Test System[J];压电与声光;2012-03
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved