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Microtechnology/Nanotechnology and MEMS

ZHOU Zhaog Ying,YE Xiong Ying,CUI Tian Hong,ZHANG Lian (Dept.of Precision Instruments and Mechanology of Tsinghua University,Beijing 100084)  
MEMS and micro machine technology is a developing field.This paper deals with the process of microtechnology/nanotechnology,micro machining,the concept and main topic of MEMS and other fields.
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