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《OPTICS AND PRECISION ENGINEERING》 1998-01
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Microtechnology/Nanotechnology and MEMS

ZHOU Zhaog Ying,YE Xiong Ying,CUI Tian Hong,ZHANG Lian (Dept.of Precision Instruments and Mechanology of Tsinghua University,Beijing 100084)  
MEMS and micro machine technology is a developing field.This paper deals with the process of microtechnology/nanotechnology,micro machining,the concept and main topic of MEMS and other fields.
【CateGory Index】: TP271.4
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【References】
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5 LIU Ben-dong1,LI De-sheng1,YANG Xiao-bo2(1.College of Mechanical Engineering and Applied Electronics Technology,Beijing University of Technology,Beijing 100022,China;2.Beijing Vocational College of Agriculture,Beijing 102208,China);Research of a monostabillity micro electromagnetic relay[J];光学精密工程;2007-04
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【Citations】
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1 Zhou,Zhao-ying;Ye,Xiong-ying;Hu,Min;You,Zheng(Tsinghua University);Advance in Micro Electro Mechanical Systems[J];仪器仪表学报;1996-S1
【Co-citations】
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1 Zhang Dongfeng Kong Deyi Mei Tao Tao Yongchun (State Key Laboratory of Transducer Technology,Institute of Intelligent Machines,CAS,Hefei 230031,China);Present Status and Prospect of the Miniaturized Ion Mobility Spectrometry[J];仪器仪表学报;2006-02
2 WANG Ya-zhen ZHU Wen-jian (College of Mechanical Engineering,South China University of Technology,Guangzhou 510640,China);MEMS Technology and Developing Trend[J];机械设计与研究;2004-01
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7 ZHOU Zhaog Ying,YE Xiong Ying,CUI Tian Hong,ZHANG Lian (Dept.of Precision Instruments and Mechanology of Tsinghua University,Beijing 100084);Microtechnology/Nanotechnology and MEMS[J];光学精密工程;1998-01
8 Liu Jing Shi Gengchen (Department 8 of Beijing Institute of Technology,100081);Microelectromechanical System (MEMS) Technology and Its Application in Fuzes[J];现代引信;1997-03
9 Li Luming,Ren Yantong,Wang Liding,Shao Peige (Changchun Institue of Optics and Fine Mechanics, Chinese Academy of Sciences,Changchun 130022);Development of Microgripper Technique[J];光学精密工程;1997-04
10 Yuan Weizheng Li xiaoying (Northwestern Polytechnical University, Xi′an 710072);Micro machine and Micro fabrication Technology[J];机械科学与技术;1997-03
【Co-references】
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1 YOU Zheng, ZHANG Gao-fei, LIN Yang,REN Da-hai(Department of Precision Instruments and Mechanology, Tsinghua University,Beijing 100084, China);Design and modeling of MEMS-based solid propellant propulsion[J];光学精密工程;2005-02
2 LIU Ze-wen, WEI Jia, WANG Yu, FANG Jie,LIU Li-tian,LI Zhi-jian(Institute of Microelectronics, Tsinghua University, Beijing 100084, China);Analysis and optimization of a side pull-down electrodes controlled MEMS varactor[J];光学精密工程;2005-02
3 LI Sheng-yi, LIU Zong-lin, WU Xue-zhong (College of Mechatronics Engineering and Automation, National Univ. of Defense Technology, Changsha 410073, China);Developments of Microaccelerometer Research[J];国防科技大学学报;2004-06
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7 LI Zhi, WANG Xiang-jun (National Laboratory of Precision Measurement Technology and Instruments,College of Precision Instrument and Opto-electronic Engineering, Tianjin University, Tianjin 300072, China);MEMS measurement technologies and methods[J];光学精密工程;2003-01
8 Zhang Yufeng Zhang Pengfei L i Desheng Wang Donghong (Dept.of Automatic Testand Control,H arbin Institute of Technology,H arbin15 0 0 0 1);A Novel Micro Electromagnetic Relay Based On MEMS Technology[J];仪器仪表学报;2001-S1
9 Zhang Siming;Summarization of Micro-special Motor New Principle and New Construction at Home and Abroad[J];电子元器件应用;2001-Z1
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【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 LI Jian-jun;XI Ye;WANG Qun;School of Electronic Science & Applied Physics,Hefei University of Technology,Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province;;RF MEMS Tunable Stop-filter on Coplanar Waveguide[J];仪表技术与传感器;2016-09
2 QU Jianjun;GUO Wenfeng;HU Zhiyong;WANG Peiming;School of Mechatronics Engineering,Harbin Institute of Technology;Aerospace Dongfanghong Satellite Corporation;;Mathematical Model and Simulation of a Kind of Inverse Piezoelectric Linear Inchworm Motor[J];机械工程学报;2015-18
3 KONG De-jun;FU Gui-zhong;GUO Hao-yuan;College of Mechanical Engineering,Changzhou University;;Interface diffusion mechanism and binding strength of TiAlCN coatings[J];光学精密工程;2014-05
4 DU Jian-hua;LIU Yan-wei;LI Yuan-yuan;Department of Scientific Research,Academy of Armored Force Engineering;School of Material Science and Engineering,University of Science and Technology Beijing;;Friction properties of Cu-based friction materials reinforced by nanometer materials[J];光学精密工程;2013-10
5 LIU Lei,ZHANG Gao-fei,YOU Zheng(Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);Research on effect of environmental temperature on RF-MEMS switch pull-in voltage[J];传感器与微系统;2013-05
6 LI Yi-quan,SHI Qing-yong,YU Hua-dong,YU Zhan-jiang(Department of Mechanical Engineering,Changchun University of Science and Technology,Changchun 130022,China);Design of Elastic Element with Double Parallel Spring for Micro-Friction Test[J];仪表技术与传感器;2012-12
7 CUI Yan1,WANG Fei1,DONG Wei-jie2,YAO Ming-lei1,WANG Li-ding1(1.Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education,Dalian Vniversity of Technology,Dalian 116024,China; 2.School of Electron Science and Technology,Dalian University of Technology,Dalian 116024,China);Nonlinear piezoelectric energy harvester[J];光学精密工程;2012-12
8 HU Changde①,FU Peng②,MIN Heping②,MAO Anding②,DENG Xiaolin② ①Department of Non-commissioned Officer,the Academy of Equipment Command & Technology,Beijing 102200,CHN;②Equipment Repairing Group of Tibet Military Area Command,Lasa 850000,CHN;Study on a kind of the rotary stepping piezoelectric micro-platform[J];制造技术与机床;2012-09
9 Ren Ning1,Ou Kailiang1,Wang Changlu1,Zhou Feng2(1 Zhengzhou Research Institute of Mechanical Engineering,Zhengzhou 450052; 2 Zhengzhou Total Solution Company Offshore Equipment Co.Ltd,Zhengzhou 450001);Calculation and Analysis of the Rigidity for Parabola-rectangle Flexural Hinges[J];机械科学与技术;2012-08
10 ZHANG Yachao,ZHAO Meirong,LIN Yuchi(State Key Lab.of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China);Piezoelectric Micro-angle Rotary Actuator and Close-loop Control Test System[J];压电与声光;2012-03
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