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Measurement of Microstructures Topography

ZHOU Ming Bao,LIN Da Jian (State Lab of Optical Technologies on Microfabrication, Institute of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209) GUO L Rong,GUO Yong Kang (Physics Department, Sichuan University, Chengdu 610041)  
The existing various methods used to measure the surface topography of micro structures are described. The principle, property and present situation of these methods are analyzed. Comparison for superiority, the existing problems and the applied range of these methods are given.
【CateGory Index】: TG806
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