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《OPTICS AND PRECISION ENGINEERING》 1999-03
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Measurement of Microstructures Topography

ZHOU Ming Bao,LIN Da Jian (State Lab of Optical Technologies on Microfabrication, Institute of Optics & Electronics, Chinese Academy of Sciences, Chengdu 610209) GUO L Rong,GUO Yong Kang (Physics Department, Sichuan University, Chengdu 610041)  
The existing various methods used to measure the surface topography of micro structures are described. The principle, property and present situation of these methods are analyzed. Comparison for superiority, the existing problems and the applied range of these methods are given.
【CateGory Index】: TG806
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【References】
Chinese Journal Full-text Database 10 Hits
1 Feng Bin Wang Jianhua;Optical Means used in Measuring Surface Microtopography[J];Tool Engineering;2005-11
2 JING Weixuan, JIANG Zhuangde (Institute of Precision Engineering, Xi'an Jiaotong University, Xi'an 710049, China);Measurement and quality control of optical discs with atomic force microscope (AFM)[J];Optics and Precision Engineering;2003-04
3 LIU Tian-Jun, ZHANG Wei-Yi , HOU Li-Ya(School of Mechanical Engineering ,Nanjing University of Science and Technology , Nanjing 210094, China);Development of cell injection pipette puller[J];Optics and Precision Engineering;2003-05
4 WU Zhao-xi, HUANG Yuan-qing(Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005,China);Study on optical methods for 3-D shape measurement[J];Optical Technique;2006-S1
5 Zhou Mingbao Lin Dajian (State Laboratory of Optical Technologies on Microfabrication, Institute of Optics and Electronics, The Chinese Academy of Sciences, Chengdu 610209) Guo Lvrong Guo Yongkang (Physics Department, Sichuan University, Chengdu;Expanding Depth Measurement Range by White-Light Phase Shifting Interferometry[J];ACTA OPTICA SINICA;2000-08
6 Yang Chunlan Pu Zhaobang Zhao Hui (P.O.Box 305,Harbin Instiutte of Technology,Harbin 150001);Applications of geometrical optical stylus technologies in surface topography measurement[J];Laser Journal;2000-06
7 YANG Xian-feng;CAI Sao-qiu(Faculty of Mechanical Engineering,Jiujiang University,Jiujiang,332005);RESEARCH ON DIC MEASUREMENT OF SUPERFINISH MACHINING SURFACE[J];Journal of Jiujiang University;2007-06
8 CHEN Ye-jin~1,FAN Kuang-chao~(1,2),LIU Yu-sheng~1(1.Hefei University of Technology,Hefei,Anhui 230009,China;2.Department of Mechanical Engineering,Taiwan University,Taipei,Taiwan 106,China);An Innovative Micro/nano Probe Measurement System for 3D Profile of Microcomponent[J];Acta Metrologica Sinica;2006-01
9 ;The Optical Means Used in Measuring Surface Microtopography[J];Metrology and Measurement Technique;2005-06
10 NIU Wen_xue 1, LIANG Yi_jun 2, JIANG Yu 2, TAN Xi_qing 2 (1.Department of Physics,Anyang 454900,China;2.College of Science, Harbin Engineering University, Harbin 150001,China);Experimental Study of the Method for Inspecting Optic Fiber End[J];Applied Science and Technology;2002-03
China Proceedings of conference Full-text Database 2 Hits
1 WU Zhao-xi, HUANG Yuan-qing (Department of Mechanical and Electrical Engineering ,Xiamen University, Xiamen 361005, China);Study on optical methods for 3-D shape measurement[A];[C];2006
2 ZHANG Hong-xia, ZHANG Yi-mo, JING Wen-cai, ZHOU Ge, LI Zhao-hui,LI Yan College of Precision Instrument & Opto-electronics Engineering, Tianjin University, Tianjin 300072, P. R. China,Key Laboratory of Opto-electronics Information and Technical Science (Tianjin University), Ministry of Education, Tianjin 300072, China;Microsurface Three-dimensional Topography Measurement by the Mirau phase-shifting interferometry[A];[C];2004
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 ZHOU Ming-zheng (Dept. of Comp. Sci. & Engn., Anhui Institute of Mechanical & Electrical Engineering, Wuhu 241000, China);The research of curve fitting method based on genetic algorithm[J];JOURNAL OF ANHUI INSTITUTE OF MECHANICAL AND ELECTRICAL ENGINEERING;2000-03
2 JIA Shu hai,JIANG Hong, YUE Kai duan,TAN Yu shan (Laser & IR Institute,School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an,710049 China);An Unwrapping Error-correcting Method and Its Application in ESPI[J];SEMICONDUCTOR OPTOELECTRONICS;2000-01
3 ZHU Liang-chen,HU Yue-li,RAN Feng (Microelectronics R&D Centre,Shanghai University,Shanghai200072,China);IC strides towards the new technology of 90nm[J];Micronanoelectronic Technology;2003-10
4 CHEN Xing,CUI Da-fu,LIU Chang-chun,WANG Li (State Key Lab. of Transducer Tech.,Inst. of Electronics,Chinese Academy of Sciences,Beijing 100080,China);BioMEMS Technology Based Sample Pretreatment Microfluidic Chips[J];Micronanoelectronic Technology;2006-01
5 Wang Xiaofei Luo Hongkui Guo Hongxi (College of Electronics and Information Engineering, College of Mechanical and Electrical Engineering , Northern Jiaotong University,Beijing 100044);Noncontact Holographic Optical Measuring Method of the Surface Profile[J];JOURNAL OF NORTHERN JIAOTONG UNIVERSITY;1998-04
6 ]He Yonghui Yan Yonggen (Shanghai Baosteel Research Institute) Xu Yaohuan (Baosteel Cold Rolling Department) Jiang Jianfeng (Harbin Institute of Technology);Surface 3D Micro Topography Measuring System for Cold Rolled Steel Sheet[J];BAO STEEL TECHNOLOGY;2000-02
7 LI Cheng-gui, SHI Zhao-yao ( 1.College of Measurement and Control, Beijing University of Aeronautics and Astronautics, Beijing 100083, China; 2.College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100022, China );Spectrum Moment Characteristics of 3-D Rough Surface[J];Journal of Beijing Polytechnic University;2003-04
8 HE Gang,AN Shiqi,JIANG Jie(Information Engineering School,UIST Baotou,Baotou 014010,China);The implementation of high-speed communication between parallel port and equipment in EPP mode[J];Journal of Baotou University of Iron and Steel Technology;2003-02
9 QUAN Wei,CAI Huai,YU Xiao-juan (School of Information & Technology,SWJTU,Chengdu 610031,China);Design of temperature and humidity monitoring system based on Atmega16[J];Journal of Chengdu University of Information Technology;2007-04
10 GENG Shujie~1 ZHOU Chengzhi~2(1.College of photoelectric Engineering,Changchun University Sciences and Technology, Changchun 130022; 2.Changchun Institute of Optics and Fine Mechanics and Physics of Chinese Academy of Sciences, Changchun 130021);The Test Technique of Super-smooth Toroidal mirror[J];Journal of Changchun Institute of Optics and Fine Mechanics;2005-02
【Secondary References】
Chinese Journal Full-text Database 10 Hits
1 YAN Yong-gang, MA Qiang, HUANG Jun-jie, LIU Wan-li, SUN Da-xu, LIANG Zhi-yong (Precision Engineering Institute, Henan Polytechnic University, Jiaozuo 454003, China);Study on the AFM-Based Detection Storage Medium Surface[J];Micronanoelectronic Technology;2005-03
2 ZHU Li,HOU Li-ya,ZHANG Wei-yi (School of Mechanical Engineering,Nanjing University of Science & Technology,Nanjing 210094,China);Review of the Research on Micromixer[J];Micronanoelectronic Technology;2005-04
3 SUN Yan-ling(Department of Mechnical Engineering,Hubei Xiangfan University,Xiangfan 441053,China);Application of Michelson micro-interference principle in the surface profile measuring[J];Transducer and Microsystem Technologies;2006-07
4 LIU Qing-qing LI Han-yan PU Zhao-bang Department of Automatic Testing and Control,H.I.T,Harbin 150001,China;Measurement Technology of Surface Topography by Optical Method[J];Electro-Optic Technology Application;2008-02
5 ZHANG Xiao-le,HOU Li-ya,ZHANG Wei-yi (School of Mechanical Engineering,Nangjing University of Science and Technology,Nanjing 210094,China);Design and experiment of hot rheologic deformation puller for fabricating vitreous three-way microchannel[J];Optics and Precision Engineering;2008-09
6 ZHANG Xiao-le,HOU Li-ya,ZHANG Wei-yi (School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China);Fabrication of in-line micropipette for digital micro-jetting experiment[J];Optics and Precision Engineering;2008-11
7 HAO Xian-peng1,2, REN Jian-yue1, ZOU Zhen-shu1(1. Changchun Institute of Optics , Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun 130033, China;2. Graduate University of Chinese Academy of Sciences, Beijing, 100039, China);Design of focus error detection system based on critical angle method[J];Optics and Precision Engineering;2009-03
8 SUN Da-xu,LIU Wan-li,MA Qiang,YAN Yong-gang(Precision Engineering Institute,Henan Polytechnic University,Jiaozuo 454003,China);The study of optical disk pattern based on AFM[J];Optical Instruments;2005-05
9 XU Lin1,2,LI Boquan2,DING Jianning1,3,FAN Zhen1,2,CHENG Guanggui1(1.Center of Micro/Nano Science and Technology,Jiangsu University,Zhenjiang 212013,China;2.School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China;3.Jiangsu Polytechnic University,Zhenjiang 213164,China);AFM measurement of micro-structure on optical disc surface[J];Optical Instruments;2008-04
10 Shi Lingna~(1,2) Huang Shanglian~1 Sun Jiyong~1 Zhang Zhihai~1 Zhang Jie~(1,2) Wei Wei~11 Key Lab of Opto-Electronic Technology and Systems, Ministry of Education, Collegeof Optoelectronic Engineering, Chongqing University, Chongqing 400030, China2 College of Science, Chongqing Jiaotong University, Chongqing 400074, China;Analysis and Experiment of Surface Bending of Grating Light Modulator[J];Acta Optica Sinica;2009-04
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