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《Optical Technology》 2001-02
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Surface 3D profiler based on scanning white light interferometry method

HE Yong hui 1, JIANG Jian feng 2, ZHAO Wan sheng 3 (1 Baosteel Research Institute, Shanghai 201900, China) (2 Shanghai Jiaotong University, Shanghai 200030, China) (3 Harbin Institute of Technology, Harbin 150001, China)  
On the base of emphasizing the importance of surface 3D topography measurement, this paper introduces the principle of scanning white light interferometry method and presents the constitution of surface 3D profiler's measuring system Next, several measuring examples are presented to explain the main characteristics of the profiler, namely, adapting to the measurement of large scale, high precision and discontinuous surface Finally, the main factors which influence the precision are analyzed
【CateGory Index】: TH744.3
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