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《Optical Technique》 2005-06
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The research of a method to obtain the optical parameters of semiconductor films

LIU Yong,SONG Chen-lu,WANG Jian-xun,HAN Gao-rong (State Key Laboratory for Silicon Materials,Materials Science and Engineering Department,Zhejiang University,Hangzhou 310027,China)  
It is very important for preparation and application of films to easily measure their optical parameters.A method to obtain the films' optical parameters from its reflection and transmission spectra was presented by using the Forouhi-Bloomer dispersion relation to describe the optical parameters of semiconductor films.The roughness of films was considered,and films thickness distribution was assumed to be normal distribution.Simulated annealing method and iteration method were combined to calculate the optical parameters.For instance,three silicate films sample are calculated and results of films' thickness are agreement with the spectroscopic ellipsometry results.This method is valuable for semiconductor films optical research work in practices.
【Fund】: 国家高技术研究发展计划(863计划)资助项目(2001AA320202)
【CateGory Index】: TN304;
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