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《Optical Technique》 2006-04
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A vertical scanning white-light interfering profilometer

DAI Rong~(1,2),XIE Tie-bang~1,CHANG Shu-ping~1 (1.School of Mechanical Science & Engineering,Huazhong University of Science and Technology,Wuhan 430074,China) (2.School of Mechannical and Electronic Engineering,Wuhuan University of Technology,Wuhan 430070,China)  
Based on the white-light interference,a vertical scanning white-light interfering profilometer was designed.The stage to realize the vertical scanning motion is analyzed.The vertical positioning of the profilometer is 1nm,and can be applied to measuring surface roughness,step height,film thickness etc.
【Fund】: 国家自然科学基金资助项目(50175037)
【CateGory Index】: TH744.3
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