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《Optical Technique》 2007-03
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The developments of Si microchannel plates for electron multiplying

NIU Li-hong,FENG Yu-chun,KUO Xiao-mei,WANG Yun-cheng (Institute of Optoelectronics,Shenzhen University,Shenzhen 518060,China)  
Silicon microchannel arrays with the diameters of 8μm,16μm,25μm,and 40μm were fabricated on Silicon slices of 2 inch and 4 inch with directional plasma etch.And continuous dynodes were prepared with PECVD and liquid MgO deposition respectively.The new approach for developing Si microchannel plates(MCP) was investigated.The gain and gain uniformity of samples were tested with UV optoelectronic system.The experimental results show that it is possible to develop a Si microchannel plates of higher gain and better gain uniformity compared with standard glass MCPs.
【Fund】: 深圳市科技计划资助项目(200449)
【CateGory Index】: TN152
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