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The Design of Optical System for High Precision CCD Automatic Size Control

Sun Xuezhu Fu Weiqiao Liu Qing Wang Qingyou(Department of precision Instrument Engineering Tian jin Vniversity, Tian jin 300072)  
This paper introduces the principle of operation for the CCD automatic size control sys-tem with measured precision of ±0.003mm.The optical system design and structure of infinite objec-tive are discussed in all details. The optical calculation and aberration correction are done.The aberra-tion curve and tested results are also given.The instrument has high automatic control precision and speed.Its performance is also reliance.It has been widly used in a production.
【CateGory Index】: TH74
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