Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Equipment Manufacturing Technology》 2012-09
Add to Favorite Get Latest Update

Research on Design of Two-dimensional Precision Positioning Stage Driven by Linear Motors

CAO Wei-feng(Yulin University,Yulin Shaanxi 719000,China)  
At first,overall design of two-dimensional precision positioning stage driven by linear motors are performed,afterward type of the linear motor,precision linear rolling guide way are selected,?at last,the positioning accuracy of the stage are analyzed.The test result of model machine show that the positioning accuracy on X/Y directions is satisfactory,this provides a reference for system calibration and error compensation
【Fund】: 榆林学院高层次人才科研启动基金项目(08GK037)
【CateGory Index】: TM359.4
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 3 Hits
1 WU Yu-hou,SONG De-ru (School of Traffic & Mechanical Engineering,Shenyang Jianzhu University,Shenyang,P.R.China 110168);The Study of Positioning Accuracy of Linear Motors and Error-Compensation Technology Based on PMAC[J];Journal of Shenyang Architectural and Civil Engineering Institute;2005-05
2 SONG Wenrong1,YU Guofei2,WANG Yanfeng1,HE Huiyang1,TIAN Xingzhi1(1.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130022,China;2.Mechanical Science and Engineering Academy of Jilin University,Changchun 130025, China);Research on Six Degrees of Freedom Mag-lev Stage with Nanometer Positioning Accuracy[J];Microfabrication Technology;2003-01
3 ;Design and Control of High Precision Linear Motor Drive Mechanism[J];New Technology & New Process;2003-10
Chinese Journal Full-text Database 10 Hits
1 LIN Weicai,WANG Jin(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033);A Design of New Focal System[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2007-04
2 LIN Weicai,WANG Jin(Chinese Academy of Sciences,Changchun Institute of Optics,Fine Mechanics and Physics,Changchun 130033);A High Precision Focal System Design[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2010-04
3 XIA Fenglin,JIANG Gaoming,GE Mingqiao(School of Textiles & Clothing,Jiangnan University,Wuxi,Jiangsu 214122,China);Moving precision analysis of electronic shogging system on high speed warp knitting machine[J];Journal of Textile Research;2009-03
4 LU Min-xun ,LIU Jun-jie(School of Mechanical Engineering, Tongji University, Shanghai 200092, China);Investigation on a nano-level precision positioning table[J];Chinese Journal of Construction Machinery;2006-04
5 LIN Wei-cai (Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China );Theodolite Focal System Design[J];OME Information;2010-12
6 LIN Bin~1, ZHANG Xiao-feng~1,Zhang Guo-liang~2 (1. Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education,Tianjin University,Tiangjing 300072,China; 2. Tianjin Taiji Precision Ceramics CO,LTD.,Tiangjiang 300461,China);Application of silica ceramic in precision stage[J];Optics and Precision Engineering;2005-01
7 SHI Yan-hua(Guangzhou Panyu Polytechnic,Panyu Guangdong 511483,China);Key Technology Study on High-speed Precision 5-axis Linkage Gantry Machining Center[J];Equipment Manufacturing Technology;2009-03
8 PENG Yifan,YUAN Bo,CAO Xiangqun (NERC for Optical Instrument,State Key Laboratory of Modern Optical Instrumentation, ZhejiangUniversity,Hangzhou 310027,China);Technical status and developing trend of lithographic tools[J];Optical Instruments;2010-04
9 LIU Yu,HU Yue,WU Fei(Shanghai micro electronics equipment Co.,Ltd,Shanghai 201203,China);Topological Lightweight Design of Rectangle Mirror of Wafer Stage[J];Equipment for Electronic Products Manufacturing;2013-05
10 LIANG Feng-xi,ZHONG Pei-si,DING Shu-hui,LIU Mei,ZHAO Jie(Advanced Manufacturing Technology Center,Shandong University of Science and Technology,Qingdao 266590,China);Design and analysis of CNC revolving punch[J];Forging & Stamping Technology;2013-03
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 XIE Chang qing,YE Tian chun (The 3rd Lab of Microelectronics R&D Center,The Chinese Academy of Sciences,Beijing 100010,China);Extreme ultraviolet lithography technology[J];Semiconductor Information;2001-05
2 LI Yan qiu (Micro & Nano Fabrication Devision,Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100080,China);The status and tendency of next generation lithography[J];Micronanoelectronic Technology;2003-Z1
3 WANG Fang1, ZHANG Ying-Hui2, ZHAO Mei-ning1 (1. Xi'an Institue of Technology, Xi'an 7100332, China; 2 Kunming University of Technology, Kunming 650093, China);The Modal Analysis of Blanket Cylinder Based on ANSYS[J];Packaging Engineering;2005-04
4 LI Ruo-qing(The45th Institute of CETC,Yanjiao065201,China);The Pneumatic Structure Analysis of Step&Scan Stage[J];Equipment For Electronic Products Manufacturing;2003-03
5 ZHU Yu,YIN Wen-sheng,DUAN Guang-hong(Department of Precision Instruments,Tsinghua University);RESEARCH ON ULTRA-PRECISION STAGES OF LITHOGRAPHY[J];Equipment For Electronic Products Manufacturing;2004-02
6 Xie Chuanbo (Institute of Optics & Electronics,Chinese Academy of Sciences, Chengdu, 610209);Investigations of Precision Fast Positioning Stage for Wafer Stepper[J];OPTO-ELECTRONIC ENGINEERING;1996-04
7 Hu Song, Su Weijun (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,610209);Design and Calculation of 6 D Wafer Positioning System for 0.8-1μm Wafer Stepper[J];OPTO-ELECTRONIC ENGINEERING;1998-03
8 Liu Yeyi, Tian Tong, Qian Jin (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,610209);Laser Stage System for Sub Micron E Beam Exposure Machine[J];OPTO-ELECTRONIC ENGINEERING;1998-03
9 Yao Hanming,Zhou Mingbao,Tian Hong (State Key Laboratory of Optical Technologies for Microfabrication,Institute of Optics and Electronics, Chinese Academy of Sciences,Chengdu,610209);Microlithography Technologies Marching toward 21st Century[J];OPTO-ELECTRONIC ENGINEERING;1999-01
10 ;Development of 100nm step-scanning projection photographic machine[J];Optics Mechanics & Electronics Information;2004-05
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved