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LCD Real-Time Mask Technique for Fabrication of Continuous Microoptical Elements

Peng Qinjun Guo Yongkang Chen Bo Liu Shijie Zeng Yangsu (Institute of Information Optics, Department of physics, Sichuan University, Chengdu 610064) (Received 22 January 2002; revised 27 May 2002)  
A new technique for fabrication of continuous microoptical elements by using LCD (liquid crystal display) real-time mask is proposed, and its principle and design method are expatiated. Based on partial coherent imaging theory, the process to fabricate the micro-axicon and the microlens has been simulated. The experimental setup for LCD real-time mask technique was built by using the color LCD in {authors′} laboratory. and the micro-axicon array has been fabricated. The 3|dimensional surface relief structure was shaped in the pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The caliber of axicon is 118.7 μm, and the etching depth is 1.322 μm.
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