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《Acta Optica Sinica》 2009-08
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Zero Calibration for the Designed Microscanning Thermal Microscopic Imaging System

Gao Meijing~(1,2) Jin Weiqi~1 Wang Xia~1 Yu Jie~1 (1 Department of Optical Engineering,Beijing Institute of Technology,Beijing 100081,China 2 Department of Photoelectron,Yanshann University,Qinhuangdao,Hebei 066004,China)  
In order to improve the spatial resolution of the optical microscanning thermal microscopic system,the zero of microscanning should be determined to complete the oversample reconstruction.Based on the geometric principle and digital imaging processing,a new zreo calibration was presented.The definition,the working principle and the method were analyzed,and the microscanning zero calibration of the real system was done.Different reconstruction methods were applied to reconstruct the thermal image and the real thermal microscopic image, moreover the evaluation parameters were given.Results of simulation and real thermal imaing peocessing show the availability of the zero calibration,thus the high resolution optical microscanning thermal microscopic system has been achieved.The system can be applied into many systems which need microscopic thermal anslysis with high spatial resolution.
【Fund】: 北京市自然科学基金(4062029);; 科技部中小型科技型企业创新基金(06KW1051)资助项目
【CateGory Index】: TN16
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