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《Acta Optica Sinica》 2009-10
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Study and Fabrication of Visible and IR Dual-Band Broadband Antireflection Coating

He Caimei Fu Xiuhua Zhang Jiabin Li Shan(College of Optical and Electronical Information Changchun University of Science and Technology,Changchun,Jilin 130022,China)  
In order to meet the military instruments' operating requirements,An antireflection coating on the substrate of ZnS at 400~1000 nm(visible and near infrared band) and 7~11 μm(far infrared band) is deposited,it requires a average transmittance over 90%.Electronic beaming vacuum depositing method is adopted with the aid of ion assistant deposition systems as well as chose ZnS as the material of high refractive index and YbF3 as the material of low refractive index.Using three modular processing systems of the latest optilayer software as assistance,optimizing technical parameters,and improving monitor method,reducing thickness error,antireflection coating on the substrate of ZnS to achieve the requirements have be deposited.The average transmittance exceeds 91% through 400~1000 nm wavelength.Moreover,it makes the transmittance over 90% through 7~11 μm wavelength.In addition,the film can resist harsh environment and completely meet the demands of military optical instruments.
【CateGory Index】: O484.41
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